Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Design and fabrication of a highly sensitive microcalorimetric biosensor by bulk micromachining

벌크 마이크로 머시닝을 이용한 고감도 미세 칼로리미터의 설계 및 제작

  • Yoon, S.I. (School of Mechanical Engineering, Yonsei University) ;
  • Kim, J.H. (School of Mechanical Engineering, Yonsei University) ;
  • Kwak, B.S. (School of Mechanical Engineering, Yonsei University) ;
  • Kim, Y.J. (School of Mechanical Engineering, Yonsei University) ;
  • Jung, H.I. (School of Mechanical Engineering, Yonsei University)
  • Published : 2006.05.31
Download PDF
⟨ Previous Next ⟩

Abstract

Calorimeter is one of widely used biosensors. Conventional or existing calorimeters are realized directly on a silicon wafer which has very high thermal conductivity. It results in decreasing temperature difference between junctions and it makes a sensitivity of calorimeter to be decreased. In this study, the microcalorimeter was made by using MEMS(Micro Electro Mechanical Systems)-technology and hot junctions of the microcalorimeter are released from a silicon substrate to reduce loss of generated heat by reactions between biomolecules. Sensitivity of the released microcalorimeter was 18 mV/M which is 1.5 times higher than another calorimeters on silicon substrate by reactions between biotin and streptavidin.

Keywords

References

  1. Y. Zhang and S. Tadigadapa, 'Calorimeteric biosensors with integrated microfluidic channels', Biosensors and Bioelectronics, vol. 19, pp. 1733-1743, 2004 https://doi.org/10.1016/j.bios.2004.01.009
  2. M. Zieren and J. M. Kohler, 'A micro-fluid channel calorimeter using BiSb/Sb thin film thermopile s', Transducers '97, International Conference on SolidState Sensors and Actuators, Chicago, US, 1997
  3. R. Muanghlua, S. Cheirsirikul, and S. Supadech 'The study of silicon thermopile', TENCON 2000 Proceedings, vol. 3, pp. 226-229
  4. W. Winter and G. W. H. Hohne, 'Chip-calorimeter for small samples', Thermochimica Acta, vol. 403, pp. 43-53, 2003 https://doi.org/10.1016/S0040-6031(03)00159-X
  5. F. E. Torres, P. Kuhn, D. D. Bruyker, A. G. Bell, M. V. Wolkin, E. Peeters, J. R. Williamson , G. B. Anderson, G. P. Schmitz, M. I. Recht, S. Schweizer, L. G Scott, J. H. Ho, S. A. Elrod, P. G Schultz , R. A. Lerner, and R. H. Bruce, 'Enthalpy arrays', PNAS, vol. 10126, 9517-9522, 2004 https://doi.org/10.1073/pnas.0403573101