Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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NO gas-sensing properties of In2O3 nanobelt films prepared by thermal evaporation

진공증착법으로 제조한 In2O3 나노벨트막의 NO가스감지특성

  • Choi, Mu-Hee (Department of Electrical Engineering & ERI., Gyeongsang Natl Univ.) ;
  • Ma, Tae-Young (Department of Electrical Engineering & ERI., Gyeongsang Natl Univ.)
  • 최무희 (경상대학교 전기공학과 및 공학연구원) ;
  • 마대영 (경상대학교 전기공학과 및 공학연구원)
  • Published : 2006.11.30
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Abstract

The films of indium oxide $In_{2}O_{3}$) were deposited onto $SiO_{2}$ coated Si wafers by a thermal evaporation method. Substrate temperature was varied from $25^{\circ}C$ to $300^{\circ}C$. Deposition rate increased to $250^{\circ}C$ and then decreased rapidly. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The films deposited at $250^{\circ}C$ were found to have a nanobelt structure. Resistor-type gas-sensors were fabricated with $In_{2}O_{3}$ films using Pt as electrodes. The resistance variation of $In_{2}O_{3}$ films with the concentration of NO gas was measured. The $In_{2}O_{3}$ films deposited at $250^{\circ}C$ showed the highest sensitivity to the NO gas.

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References

  1. T. Qiang, Z. Zhigang, Z. Wenpei, and C. Zidong, '$SO_2$ and NO selective adsorption properties of coal-based activated carbons', Fuel, vol. 84, no. 4, pp. 461-465, 2005 https://doi.org/10.1016/j.fuel.2004.03.010
  2. N. Bukun, A. Vinokurov, M. Vinokurova, L. Derlyukova, Yu. Dobrovolsky, and A. Levchenko, 'Chemisorption and electrochemical reactions of $SO_2$ on modified $SnO_2$ electrodes', Sens. Actuators B, vol. 106, no. 1, pp. 153-157, 2005 https://doi.org/10.1016/j.snb.2004.05.065
  3. N. Carmona, M. A. Villegas, and J. M. Fernandez Navarro, 'Optical sensors for evaluating environmental acidity in the preventive conservation of historical objects', Sens. Actuators A, vol. 116, no. 3, pp. 398-404, 2004 https://doi.org/10.1016/j.sna.2004.05.009
  4. J.-H. Park, M. S. Han, S. J. Park, D. H. Kim, I.-S. Nam, G. K. Yeo, J. K. Kil, and Y. K. Youn, 'Colorimetric assay for a fast parallel screening of $NO_x$ storage', J. of Catalysis, vol. 241, no. 2, pp. 470-474, 2006 https://doi.org/10.1016/j.jcat.2006.04.037
  5. Y. Shimizu and M. Egashira, 'Basic aspects and challenges of semiconductor gas sensors', MRS Bull., vol. 24, no. 6, pp. 18-24, 1999 https://doi.org/10.1557/S0883769400052465
  6. 최낙진, 반태현, 곽준혁, 임연태, 주병수, 김재창, 허종수, 이덕동, '산화주석 기반의 아세토니트릴 검지용 박막형 가스센서', 센서학회지, 제13권, 제3호, pp. 218-223, 2004 https://doi.org/10.5369/JSST.2004.13.3.218
  7. 노효섭, 최광표, 송호근, 박진성, '박막리튬이온전도체를 이용한 전위차 $CO_2$ 가스센서', 센서학회지, 제14권, 제4호, pp. 258-264, 2005 https://doi.org/10.5369/JSST.2005.14.4.258
  8. E. Comini etc., 'Light enhanced gas sensing properties of indium oxide and tin dioxide', Sens. Actuators B, vol. 65, pp. 260-263, 2000 https://doi.org/10.1016/S0925-4005(99)00350-0
  9. H. Steffes, C. Imawan, F. Solzbacher, and E. Obermeier, 'Fabrication parameters and NO sensitivity of reactively RF-sputtered $In_2O_3$ thin films', Sens. Actuators B, vol. 68, pp. 249-253, 2000 https://doi.org/10.1016/S0925-4005(00)00437-8
  10. P. W. Park, C. S. Ragle, C. L. Boyer, M. L. Balmer, M. Engelhard, and D. McCready, '$In_2O_3/Al_2O_3$catalysts for $NO_x$ reduction in lean condition', J. of Catalysis, vol. 210, no. 1, pp. 97-105, 2002 https://doi.org/10.1006/jcat.2002.3667
  11. B.-C. Kim etc., 'Effects of crystal structures on gas sensing properties of nanocrystalline ITO thick films', Sens. Actuators B, vol. 89, pp. 180-186, 2003 https://doi.org/10.1016/S0925-4005(02)00461-6
  12. X. Wang etc, 'Ammonia sensing characteristics of ZnO nanowires studied by quartz crystal microbalance', Appl. Surf Sci., vol. 252, pp. 2404-2411, 2006 https://doi.org/10.1016/j.apsusc.2005.04.047
  13. J. C. Jiang, K. Lian, and E. I. Meletis, 'Influence of oxygen plasma treatment on the microstructure of $SnO_x$ thin films', Thin Solid Films, vol. 411, pp. 203-210, 2002 https://doi.org/10.1016/S0040-6090(02)00288-2
  14. Z. W. Pan, Z. R. Dai, and Z. L. Wang, 'Nanobelts of semiconducting oxides', Science, vol. 291, pp. 1947, 2001
  15. T. Seiyama, Chemical Sensor Technology, Elsevier, Tokyo, pp. 15-38, 1988