다이아몬드를 이용한 차세대 마이크로 전자에미터 패키징

Research for the Micro Packaging of Diamond Electron Emitter

  • 이승목 (오사카부립 산업기술총합연구소) ;
  • 김종민 (중앙대학교 기계공학부)
  • 발행 : 2005.04.01

초록

키워드

참고문헌

  1. J. E. Jaskie, MRS Bulletin, 21-3 (1996). 59-71
  2. C. A. Spindt, I. Brodie, L. Humphrey and E. R. Westerberg, J. Appl. Phys., 47 (1976), 5248-5263 https://doi.org/10.1063/1.322600
  3. J. Robertson, Diamond Films and Technol., 8 (1999), 225-231
  4. F. J. Himpsel, J. A. Knapp. J. A. van Vechten and D. E. Eastman. Phys. Rev. B., 20 (1979). 624-627 https://doi.org/10.1103/PhysRevB.20.624
  5. K. E. Spear, J. P. Dismukes, Synthetic diamond : emerging CVD science and technology, The electrochemical society Inc., Penington, New Jersey, 1994, 356
  6. A. Hiraki, T. Ito and A. Hatta, Oyo Buturi, 66 (1997), 235-240 (in Japanese)
  7. K. Okano, S. Koizumi, S. R. P. Silva and G. A. J. Amaratunga. Nature, 381 (1996). 140-142 https://doi.org/10.1038/381140a0
  8. I. Sakauchi, M. N. Gamo and Y. Kikuchi. Phys. Rev. B., 60 (1999). R2139-2141 https://doi.org/10.1103/PhysRevB.60.R2139
  9. S. Koizumi, M. Kamo, Y. Sato, H. Osaki and T. Inuzuka, Appl. Phys. Lett., 71 (1997). 1065-1067 https://doi.org/10.1063/1.119729
  10. R. Kalish, Diamond Relat. Mater., 10 (2001). 1749-1755 https://doi.org/10.1016/S0925-9635(01)00426-5
  11. C. Wang, A. Garcia, D. C. Ingram, M. Lake and M. E. Kordesch, Electronics Lett., 27 (1991). 1459-1460 https://doi.org/10.1049/el:19910914
  12. C. Bandis and B. B. Pate, Appl. Phys. Lett., 69 (1996). 366-368 https://doi.org/10.1063/1.118062
  13. A. Hatta, T. Ito and A. Hiraki, Oyo Buturi, 67 (1998), 1410-1413 (in Japanese)
  14. M. W. Geis, N. N. Efremov, J. D. Woodhouse, M. D. McAleese, M. Marvwka, D. G. Sacker and J. F. Hochedez, IEEE Trans. Electron. Devices. 12 (1991). 456-459 https://doi.org/10.1109/55.119164
  15. A. Hatta, K. Ogawa, N. Eimori, M. Deguchi, M. Kitabatake, T. Ito and A. Hiraki. Appl, Surf. Sci., 117/118 (1997), 592-596 https://doi.org/10.1016/S0169-4332(97)80148-1
  16. T. Ito, M. Nishimura, M. Yokoyama, M. Irie and C. Wang, Diamond Relat. Mater., 9 (2000). 1561-1568 https://doi.org/10.1016/S0925-9635(00)00293-4
  17. S. Lee, H. Murakami and T. Ito, Applied Surface Science, 175-176 (2001). 517-524 https://doi.org/10.1016/S0169-4332(01)00058-7
  18. S. Lee, H. Murakami and T. Ito, J. Mater. Res., 17 (2002). 1914-1922 https://doi.org/10.1557/JMR.2002.0284
  19. S. Lee and T. Ito. Diamond Relat. Mater., 11 (2002). 1952-1961 https://doi.org/10.1016/S0925-9635(02)00214-5