Abstract
We design a new actuator of 3-axis motion for high performance optical devices. The actuator makes it possible to control the tilting motion by using moving magnet and PCB-coil, which have benefits in price and manufacturing. To predict the characteristics of the actuator, especially the effect of moving magnet, finite element method and electro-magnetic analysis were used. By comparing simulation data with experimental results, we verified the accuracy of the simulation and the superiority of the present.