Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Crystallization and Electrical Properties of SBN60 Thin Films Prepared by Ion Beam Sputter Deposition

  • Jang, Jae-Hoon (Department of Materials Science and Engineering, Yeungnam University) ;
  • Jeong, Seong-Won (Department of Materials Science and Engineering, Yeungnam University) ;
  • Lee, Hee-Young (Department of Materials Science and Engineering, Yeungnam University)
  • Published : 2005.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

$Sr_{0.6}Ba_{0.4}Nb_{2}O_{6}$, hereafter SBN60, thin films of 300 nm thickness were deposited using ion beam sputtering technique, in which sintered ceramic target of the same composition was utilized and the $Ar:O_{2}$ gas ratio was controlled during deposition onto $Pt(100)/TiO_{2}/SiO_{2}/Si$ substrate. Crystallization and orientation behavior as well as electrical properties of the films were examined after annealing treatment at $650{\sim}800{\cric}C$. It was found that the film orientation was dependent upon $Ar:O_{2}$ratio, in which strong (00l) orientation was developed when the gas ratio was about 1:4 at $4.3{\times}10^{-4}$ torr. Typical remanent polarization (2Pr), the coercive field (Ec) and the dielectric constant of Pt/SBN60/Pt thin film capacitor were approximately $10{\mu}C/cm^{2}$, 60 kV/cm, and 615, respectively.

Keywords

References

  1. Y. Xu, 'Ferroelectric materials and their application', North Holland, Amsterdam, p. 254, 1991
  2. M. D. Ewbank, R. R. Neurgaonkar, W. k. Cory, and J. Feinberg, 'Photorefractive properties of strontium- barium niobate', J. Appl. Phys., Vol. 62(2), p. 374, 1987
  3. R. B. Maciolek and S. T. Liu, 'Preparations and properties of low loss $Sr_{1-x}Ba_xNb_2O_6$ ferroelectric single crystals', J. Electron. Mater., Vol. 2, No.2, p. 191, 1973 https://doi.org/10.1007/BF02666152
  4. R. R. Neurgaonkar, M. H. Kalisher, T. C. Lim, E. J. Staples, and K. I. Keester, 'Czochralski single crystal growth of $Sr_{0.61}Ba_{0.39}Nb_20_6$ for surface acoustic wave applications', Mater. Res. Bull., Vol. 15, No.9, p. 1235, 1980
  5. P. B. Jamieson, S. C. Abrahams, and J. L. Bernstein, 'Ferroelectric tungsten bronze-type crystal structures. I. Barium strontium niobate $Ba_{0.27}Sr_{0.75}Nb_2O_{5.78}$', J. Chem. Phys., Vol. 48, No. 11, p. 5048, 1968.
  6. K. H. Hellwege and A. M. Hellwege(eds.), 'Landolt-bomstein new series', Group Ill, Vol. 28a, p. 148, 1988
  7. M. P. Trubelja, E. Ryba, and D. K. Smith, 'A study of positional disorder in strontium barium nibate', J. Mater. Sci., Vol. 31, No.6, p. 1435,1996
  8. Y. Xu, C. J. Chen, R. Xu, and J. D. Mackenzie, 'Ferroelectric $Sr_{0.6}Ba_{0.3}Nb_20_6$ thin film by the sol-gel process: Electrical and optical properties', Phys. Rev. B, Vol. 44, No.1, p. 35, 1991
  9. S. S. Thony, K. E. Youden, J. S. Harris, Jr., and L. Hesselink, 'Growth of epitaxial strontium barium niobate thin film by pulsed laser deposition', Appl. Phys. Lett., Vol. 65, No. 16, p. 2018,1994
  10. K. Tanaka, O. Nakagawara, M. Nakano, T. Shimuta, H. Tabata, and T. Kawai, 'Epitaxial growth of $(Sr.Ba)Nb_20_6$ thin films by pulsed laser deposition', Jpn. J. Appl. Phys., Vol. 37, No. 11, p. 6142, 1998
  11. C. H. Luk, M. M. T. Ho, C. L. Mak, K. J. Wong, and G. K. H. Pang, 'Fabrication and structural properties of sol-gel derived SBN films', J. Eur. Ceram. Soc., Vol. 19, No. 6-7, p. 1443, 1999
  12. C.-A. Jong and J.-Y. Gan, 'Crystallization of $Sr_{0.5}Ba_{0.5}Nb_20_6$ thin films on La$NiO_3$ electrodes by RF magnetron reactive sputtering', Jpn. J. Appl. Phys., Vol. 39, No. 2A, p. 545, 2000
  13. J. Koo, J. H. Jang, and B.-S. Bae, 'Preparation and characteristics of seeded epitaxial $(Sr,Ba)Nb_20_6$ optical waveguide thin films using sol-gel method', J. Mat. Res., Vol. 16, No.2, p. 430, 2001
  14. M. K. Ryu, S. H. Lee, H. J. Joo, J. P. Kim, M. S. Jang, and Y. S. Yang, 'Electronic defect characteristic of ferroelectric $Sr_{0.25}Ba_{0.75}Nb_20_6$ thin films', Ferroelectrics, Vol. 260, No. 1-4, p. 99, 2001
  15. D. G. Lee, H. W. Lee, H. Y. Lee, J.-J. Kim, and S.H. Cho, 'The crystallization behavior of $(Sr,Ba)Nb_20_6$ thin films prepared by a hybrid metalorganic decomposition', Ferroelectrics, Vol. 270, p. 33, 2002
  16. C. A. P. de Araujo, J. F. Scott, and G. W. Taylor (eds.), 'Ferroelectric Thin Films: Synthesis and Basic Properties', Gordon and Breach, New York, p. 393, 1996