References
- Beckmann, P. and Spizzichino, A., 1963 'The Scattering of Electromagnetic Waves from Rough Surfaces,' Pergamon Press, Oxford
- Dorf, B. C. and Bishop, R. H., 1995, 'Modern Control Systems 7th Edition,' Addison Wesley
- Hiroshi HARADA, Hideki NAKAJIMA, Teruo YAMAGUCHI and Atsuhiko NODA, 2002, 'Optical Sensing of Surface Roughness for Polishing Robot (3Rd Report),' Japan Society of Precision Engineering, Vol. 68, No. 11, pp.962-966 https://doi.org/10.2493/jjspe.68.962
- Sang-Shin Park and Yoomin Ahn, 1997, 'Surface Roughness and Material Removal Rate of Lapping Process on Ceramics,' KSME International Journal, Vol. 11, No. 5, pp. 494-504 https://doi.org/10.1007/BF02945261
- Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA and Yasufumi TATSUNO, 2002, 'Study on In-Process Measurment of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern (2nd Report) - Fast Defect Measurment Method Using LSDP,' Japan Society of Precision Engineering, Vol. 68, No.7, pp. 1431-1435 https://doi.org/10.2493/jjspe.68.1431
- Shree, K. Nayar, Katsushi Ikeuchi and Takeo Kanade, 1991, 'Surface Reflection: Physical and Geometrical Perspectives,' IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 13, No. 7, pp.611-634 https://doi.org/10.1109/34.85654
- Yim, D. Y. and Kim, S. W., 1988, 'A Non-contact Optical Roughness Measurement Technique of Ground Surfaces by Light Scattering,' KSME Journal, Vol. 12, No.6, pp. 1303-1311
- Young-Ho Seo and Jung-Hwan Ahn, 2004, 'Blending of Reflected Light Components Using Weighting Function on a Laser Surface Roughness Measurement,' Proceedings. Korean Society of Precision Engineering, pp. 356-359
- Young-Ho Seo, Ju-Nyun Kim and Jung-Hwan Ahn, 2004, 'Estimation of Specular Light Power by Adjusting Incident Laser Power for Measuring Mirror-Like Surface Roughness,' Korean Society of Precision Engineering, Vol. 21, No.6, pp.94-101
- Young-Ho Seo, Hwa-Young Kim and Jung-Hwan Ahn, 2004, 'Adjustment Algorithm of Incident Light Power for Improving Performance of Laser Surface Roughness Measurement,' Korean Society of Precision Engineering, Vol. 21, No.4, pp.79-87
- Yun-Fen Shen, 2001, 'Surface Roughness Measurement by Image Processing of Scattered Laser Beam Pattern,' Doctorial Thesis, Pusan National University
- Yun-Fen Shen, Han-Seok Lim, Hwa-Young Kim and Jung-Hwan Ahn, 1999, 'A Study on Roughness Measurement of Polished Surfaces Using Reflected Laser Beam Image,' Korean Society of Precision Engineering, Vol. 16, No. 2, pp. 145-152.