대한전기학회논문지:시스템및제어부문D (The Transactions of the Korean Institute of Electrical Engineers D)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

리니어모터 스테이지 진직도 향상을 위한 서보 시스템 계발

Development of a Servo-system for Straightness Improvement of Linear Motor Stages

  • 발행 : 2005.01.01
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초록

In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.

키워드

참고문헌

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