리니어모터 스테이지 진직도 향상을 위한 서보 시스템 계발

Development of a Servo-system for Straightness Improvement of Linear Motor Stages

  • 발행 : 2005.01.01

초록

In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.

키워드

참고문헌

  1. 권영건, 박정일, '신경회로망을 이용한 리니어 펄스 모터의 정밀제어,' 제어자동화시스템공학 논문지, 제6권, 제11호, pp. 987-994, 2000
  2. 강민식, '자기베어링계에서 외란관측기를 갖는 슬라이딩모드 제어,' 대한전기학회논문집, vol. 53D, no. 6, pp. 408-414, 2004
  3. B. Armstrong-Helouvry, P. Dupont, and C. Canudas, 'A servey of models, Analysis Tools and Compensation Methods for the Control of Machines with Friction,' Automatica, Vol. 30, No.7, pp. 1083-1138, 1994 https://doi.org/10.1016/0005-1098(94)90209-7
  4. C. Canudas de Wit, H. Olsson, K.J. Astrom, P. Lischinsky, 'A new model for control of systems with friction,' IEEE Transactions on Automatic Control, vol. 40, pp. 419-425, 1995 https://doi.org/10.1109/9.376053
  5. P. Lischinsky, C. Canudas de Wit, and G. Morel, 'Friction compensation of a schlling hydraulic robot,' Proc. of the 1997 IEEE International Conference on Control Application, pp. 294-299, 1997 https://doi.org/10.1109/CCA.1997.627557
  6. B. Bona and M. Indri, 'Friction compensation and robust hybrid control,' Proc. of the 1993 IEEE International Conference on Robotics and Automation, vol. 2, pp. 81-86, 1993 https://doi.org/10.1109/ROBOT.1993.292128
  7. D. Garagic and K. Srinivasan, 'Adaptive friction compensation for precision machine tool drive,' Control Engineering, vol. 12, pp. 1451-1464, 2004 https://doi.org/10.1016/j.conengprac.2003.10.006
  8. X.Z. Gao and S. J. Ovaska, 'Friction compensation in servo motor systems using neural networks,' Proc. of the 1999 IEEE Midnight-Sun Workshop on Soft Computing Methods in Industrial Applications, pp. 146-151, 1999 https://doi.org/10.1109/SMCIA.1999.782725
  9. C. Edwards, and S. K. Spurgeon, 'Sliding Mode Control: Theory and Applications,' TAYLOR & FRANCIS Inc, 2004
  10. V. I. Utkin, J. Guldner, and J. Shi, Sliding mode control in electromechanical systems, New-York : Taylor & Francis, 1999
  11. J. X. Xu, T. H. Lee, and Y. J. Pan, 'On the sliding mode control for DC servo mechanisms in the presence of unmodeled dynamics,' Mechatronics, vol. 13, pp. 755-770, 2003 https://doi.org/10.1016/S0957-4158(02)00062-4
  12. B. Wang, K. Gong, D. Yang, and J. Li, 'Fine attitude control by reaction wheels using variable-structure controller,' Acta Astronautica, Vol. 52, pp. 613-618, 2003 https://doi.org/10.1016/S0094-5765(02)00133-9
  13. P. Korondi, D. Young, and H. Hashimoto, 'Sliding mode based disturbance compensation for motion control,' Proc. of the International Conference on Industrial Electromics, Control and Instrumentation, vol. 1, pp. 73-78, 1997 https://doi.org/10.1109/IECON.1997.671024
  14. A. Kawamura, H. Itoh, and K. Sakamoto, 'Chattering reduction of disturbance observer based sliding mode control,' IEEE Trans. Ind. Application, vol. 30, pp. 456-461, 1994 https://doi.org/10.1109/28.287509