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고주파용 CoFeAlO계 박막의 자기적 특성

Soft Magnetic Properties of CoFeAlO Thin Films for Ultrahigh Frequency Applications

  • 김현빈 (충남대학교 공과대학 재료공학과) ;
  • 윤대식 (충남대학교 고기능성자성재료연구센터) ;
  • ;
  • 김종오 (충남대학교 공과대학 재료공학과, 고기능성자성재료연구센터)
  • Kim, Hyeon-Bin (Department of Materials Science and Engineering, Chungnam National University) ;
  • Yun, Dae-Sik (Research Center for Advanced Magnetic Maaterials, Chungnam National University) ;
  • Ha, N.-D. (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Jong-O (Department of Materials Science and Engineering, Research Center for Advanced Magnetic Maaterials, Chungnam National University)
  • 발행 : 2005.01.01

초록

RF magnetron sputtering 법으로 Co-Fe-Al-O계 박막을 상온에서 제작하여 산소분압에 따른 포화자화, 보자력, 이방성자계, 고주파에서의 투자율(1 GHz)을 조사하였다. 최적조건인 4%의 산소분압에서 제조한 $Co_{69.9}Fe_{20.5}A_{14.4O_{5.2}$ 박막은 포화자속밀도 18.1kG, 보자력 0.82 Oe, 이방성자계 24 Oe, 실효 투자율(1 GHz) 1,024의 우수한 연자성을 나타내었다. Co-Fe-Al-OrP 박막의 전기비저항은 산소분압이 560.7 ${\mu}{\omega}cm$ 이었다. 따라서 약 560.7${\mu}{\omega}cm$의 높은 전기바저항과 24 Oe의 높은 이방성 자계 때문에 $Co_{69.9}Fe_{20.5}A_{14.4O_{5.2}$ 박막이 고주파에서 우수한 연자기적 성질을 가지는 것으로 판단된다.

The influence of $O_2$ partial pressure on saturation mgnetization, coercivity, anisotropy field and effective permeability (over 1GHz) of as-deposited Co-Fe-Al-O thin films, which were fabricated by RF magnetron reactive sputtering method, were investigated. The $Co_{69.9}Fe_{20.5}A_{14.4O_{5.2}$ thin film fabricated at $O_2$ partial pressure of 4% exhibits the best magnetic softness with saturation magnetization 4${$pi}$Ms of 18.1 kG, coercivity of 0.82 Oe, anisotropy field ($H_k$) of Oe, and effective permeability (${\mu}_{eff}$) about 1,024 above 1 GHz. the electrical resistivity of Co-Fe-Al-O thin films were increased with increasing $O_2$ partial pressure, the electrical resistivity of $Co_{69.9}Fe_{20.5}A_{14.4O_{5.2}$ thin film with the best soft magnetic properties was 560.7 ${\mu}{\Omega}$am. Therefore, It is assumed that the good soft magnetic properties of $Co_{69.9}Fe_{20.5}A_{14.4O_{5.2}$ thin film results from high electrical resistivity and large anisotropy field.

키워드

참고문헌

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