참고문헌
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Kyung-Hee Park, Hyun-Wook Ryu, Yongjin Seo, Woo-Sun Lee, and Kwang- Iun Hong, 'Hillock formation of
$SnO_2$ thin films prepared by metal-organic chemical vapor deposition', Jpn. J. Appl. Phys., Vol. 42, No. 11, p. 7071, 2003 - H. W. Ryu, B. S. Park, S. A. Akbar, W. S. Lee, K. J. Hong, Y. J. Seo, D. C. Shin, J. S. Park, and G. P. Choi, 'ZnO sol-gel derived porous film for CO gas sensing', Sensor Actuat. B-Chem., Vol. 96, No. 3, p. 717, 2003
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G. P. Choi, H. W. Ryu, Y. J. Seo, W. S. Lee, K. J. Hong, D. C. Shin, J. S. Park, and S. A. Akbar, 'Cauliower hillock formation through crystallite migration of
$SnO_2$ thin films prepared on alumina substrates by using MOCVD', J. Korean Phys. Soc., Vol. 43, No.6, p. L967, 2003 -
W. Noh, Y. Shin, J. Kim, W. Lee, K. Hong, S. A. Akbar, and J. Park, 'Effects of NiO addition in
$WO_3$ -based gas sensors prepared by thick film process', Solid State Ionics, Vol. 152-153, p, 827, 2002 -
D. S. Lee, K. H. Nam, and D. D. Lee, 'Effect of substrate on
$NO_2$ -sensing properties of$WO_3$ thin film gas sensors', Thin Solid Films, Vol. 375, No. 1-2, p. 142, 2000 https://doi.org/10.1016/S0040-6090(00)01168-8 - Woo-Sun Lee, Sang-Youg Kim, Youg-Jin Seo, and Jong-Kook Lee, 'An optimization of tungsten plug chemical mechanical polishing(CMP) using different consumables', Journal of Materials Science : Materials in Electronics, Vol. 12, No.1, p. 63, 2001
- Youg- Jin Seo, Sang-Youg Kim, and Woo-Sun Lee, 'Optimization of pre-metal dielectric(PMD) materials', Journal of Materials Science : Materials in Electronics, Kluwer Academic Publishers, Vol. 12, No. 9, p. 551, 2001
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이우선, 최권우, 김남훈, 박진성, 서용진, '가스센서 적용을 위한
$SnO_2$ 박막의 CMP 특성 연구', 전기전자재료학회논문지, 17권12호, p. 1296, 2004 - 서용진, 정헌상, 김상용, 이우선, 이강현, 장의구, 'STI-CMP 공정에서 torn oxide 결함 해결에 관한 연구' , 전기전자재료학회논문지, 14 권, 1호, p. 1, 2001
- 김상용, 서용진, 김태형, 이우선, 김창일, 장의구, 'Chemical mechanical polishing (CMP) 공정을 이용한 multilevel metal 구조의 광역평탄화에 관한 연구', 전기전자재료학회논문지, 11권, 12호, p. 1084, 1998
- 이우선, 최권우, 이영식, 최연옥, 오용택, 서용진 '텅스텐 슬러리를 사용한 Cu-CMP 특성에서 산화제 첨가의 영향', 전기전자재료학회논문지, 17권,2호, p. 156, 2004
- Kevin Cooper, Anand Gupta, and Stephen Beaudoin, 'Theoretical analysis of the adhesion of asymmetrical alumina particles to thin flims', Process of Electrochemical Society, Vol. 37, No.1, p. 391, 1999