Journal of information and communication convergence engineering

  • 제3권4호
  • /
  • Pages.167-171
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  • 2005
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  • 2234-8255(pISSN)
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  • 2234-8883(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
권호 표지

Efficient Thermal Annealing for FBAR Devices

  • Song Hae-il (School of Engineering, Information and Communications University(ICU)) ;
  • Mai Linh (School of Engineering, Information and Communications University(ICU)) ;
  • Yoon Giwan (Information and Communications University(ICU))
  • 발행 : 2005.12.01
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초록

In this paper, the resonance characteristics of SMR-type FBAR devices annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing method which optimizes the annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices as a cost-effective way.

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참고문헌

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