한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

부스터를 이용한 3자유도 초정밀 위치결정 기구의 최적설계

Optimum Design of a 3-DOF Ultra-Precision Positioning Mechanism Using Boosters

  • 한석영 (한양대학교 기계공학부) ;
  • 이병주 (한양대학교 전자컴퓨터공학부) ;
  • 김선정 (한양대학원 전기제어생체공학부) ;
  • 김종오 (한양대학교 자동차공학과) ;
  • 정구봉 (한양대학원 전자전기제어계측공학과)
  • 발행 : 2005.12.01
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초록

Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs are hard to satisfy the functional requirements of the system due to difficulty in modeling and optimizing process applying an independent axiomatic design. Therefore, this paper proposes a new design and design-order based on semi-coupled axiomatic design. A planar 3 DOF parallel type micro mechanism is chosen as an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimal design has been carried out. To check the effectiveness of the optimal parameters obtained from theoretical approach, simulation is performed by FEM. The simulation result shows that a natural frequency of 200.53Hz and a workspace of $2000{\mu}m{\times}2000{\mu}m$ can be ensured, which is in very close agreement with the specified goal of design.

키워드

참고문헌

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