고분자 광자결정 나노시스템 기술

Polymer Photonic Crystal Nanosystem Technology

  • 최춘기 (한국전자통신연구원 기반기술연구소) ;
  • 김진태 (한국전자통신연구원 기반기술연구소) ;
  • 한영탁 (한국전자통신연구원 기반기술연구소) ;
  • 이우진 (한국전자통신연구원 기반기술연구소)
  • 발행 : 2005.12.01

초록

키워드

참고문헌

  1. Yablonovitch, E., 'Photonic band-gap structures,' J. Opt. Soc. Amer. B, Vol. 10, No.2, pp. 283-294, 1993 https://doi.org/10.1364/JOSAB.10.000283
  2. Murakowski, J., Pustai, D. and Prather, D., 'Etchless fabrication of photonic crystals in silicon,' J. Vac. Sci. Technol. B 20, pp. 2013-2016, 2002 https://doi.org/10.1116/1.1505958
  3. Chomski, E. and Ozin, G. A., 'Panoscopic silicon-a material for all length scales,' Advanced. Materials, 12(14), pp. 1071-1078, 2000 https://doi.org/10.1002/1521-4095(200007)12:14<1071::AID-ADMA1071>3.0.CO;2-J
  4. Chou, S.Y., Krauss, P.R., Zhang, W., Guo, L. and Zhuang, L., 'Sub-10nm imprint lithography and applications,' J. Vac. Sci. Technol, B15, pp. 2897-2904,1997 https://doi.org/10.1116/1.589752
  5. Seekamp, J., Zankovych, S., Helfer, A.H., Maury, P., Sotomayor Torres, C.M., Bottger, G., Liguda, C., Eich, M., Heidari, B., Montelius, L. and Ahopelto, J., 'Nanoimprinted passive optical devices,' Nanotechnology, 13, pp. 581-586,2002 https://doi.org/10.1088/0957-4484/13/5/307
  6. Schift, H., Park, S.G., Jung, B.K., Choi, C.-G., Kee, C.-S., Han, S.-P., Yoon, K.-B., Gobrecht, J., 'Fabrication of polymer photonic crystals using nanoimprint lithography,' Nanotechnology, 16, pp. S261-S265,2005 https://doi.org/10.1088/0957-4484/16/5/023
  7. Noda, S., Imada, M., Okano, M., Ogawa, S., Mochizuki, M., Chutinan, A., 'Semiconductor three-dimensional and two-dimensional photonic crystals and devices,' IEEE J. Quantum Electro. 38 (7), pp. 726-735, 2002 https://doi.org/10.1109/JQE.2002.1017582
  8. Liguda, C., Bottger, G., Kuligk, A., Blum, R., Eichb, M., Roth, H., Kunert, J., Morgenroth, W., Elsner, H. and Meyer, H. G., 'Polymer photonic crystal slab waveguides,' Appl. Phys. Lett., Vol. 78, No. 17, 2434-2436,2001 https://doi.org/10.1063/1.1366364
  9. Murakowski, Janusz and Prather,Dennis, 'Fabrication of Organic Photonic Crystals for Optical Wavelengths,' Proceedings of SPIE, Vol. 4440, pp. 16-24,2001 https://doi.org/10.1117/12.448035
  10. Panepucci, Roberto R., Kim, Bryan H., Almeida, Vilson R. and Jones, Matthew D. 'Slab Polymer Photonic Crystals,' Proc. of SPIE, Vol. 5597, pp. 62-67,2004 https://doi.org/10.1117/12.571406