DOI QR코드

DOI QR Code

The Dielectric Properties of BaTiO3/SrTiO3 Heterolayered Thick films by Screen Printing Method

  • Nam, Sung-Pill (Department of Electric and Electronic Engineering, KawngWoon University) ;
  • Lee, Young-Hie (Department of Electric and Electronic Engineering, KawngWoon University) ;
  • Bae, Seon-Gi (Department of Electric Engineering, Incheon University) ;
  • Lee, Sung-Gap (Department of Ceramic Engineering, Gyeongsang National University)
  • 발행 : 2005.10.01

초록

The $BaTiO_3/SrTiO_3$ heterolayered thick films were fabricated by the screen printing method on alumina substrates. The effect of the sintering temperature on the microstructure and dielectric properties of the $BaTiO_3/SrTiO_3$ thick films has been investigated. The relative dielectric constant and dielectric loss at 1 MHz of the $BaTiO_3/SrTiO_3$ heterolayered thick films with sintering temperature of $1350^{\circ}C$ were about 751 and 1.74, respectively. The remanent polarization $(P_r)$ of the pure $(Ba_{0.5}Sr_{0.5})TiO_3$ and $BaTiO_3/SrTiO_3$ heterolayered films are approximately $5.1\;{\mu}C/cm^2$ and $10\;{\mu}C/cm^2$. This study suggests that the design of the $BaTiO_3/SrTiO_3$ heterolayered thick films capacitor with different phase should be an effective method to enhance the dielectric and ferroelectric performance in devices.

키워드

참고문헌

  1. H. Basantakumar Shama, H. N. K. Sama, and A. Mansingh, 'Phase transition in sol-gel-derived barium titanate thin films', J. Appl. Phys., Vol. 31, Iss. 13, p. 1527, 1997
  2. J. Carrano, C. Sudhama, J. Lee, A. Tasch, W. H. Shepherd, and N. E. Abt, 'Electrical and reliability characteristics of lead-zirconate-titanate (PZT) ferroelectric thin films for DRAM applications', IEEE Trans. Ultrasonics, Ferroelectric and Freq. Control, Dig., Vol. 38, p. 690, 1991
  3. A. F. Tasch Jr and L. H. Parker, 'Ferroelectric materials for 64 Mb and 256 Mb DRAM', Proceedings of IEEE, Vol. 77, Iss. 3, p. 3, 1989
  4. S. G. Lee and Y. H. Lee, 'Structure properties of PZT(8020) thick films fabricated by screen printing method', Trans. EEM, Vol. 6, No.2, p. 35, 2005
  5. S. G. Lee and Y. H. Lee, 'Dielectric properties of sol-gel derived PZT(40/60)/(60/40) heterolayered thin films', Thin Solid Films, Vol. 353, p. 244, 1999
  6. Abicht, H., Voltzke, D., and Schmidt, H., 'The influence of the milling liquid on the properties of barium titanate powders and ceramics', Chem. And Phys., Vol. 51, No.3, p. 35, 1997
  7. Relva C. Buchanan, 'Ceramic materials for electronics', p. 435, 1991
  8. O. Nakagawara, T. Shimuta, T. Makino, A. Arai, H. Tabara, and T. Kawai, 'Dependence of dielectric and ferroelectric behaviors on growth orientation in epitaxial $BaTiO_3/SrTiO_3$superlattices', Vacuum, Vol. 66, p. 397, 2002
  9. R. Xu, M. Shen, S. Ge, Z. Gan, and W. Cao, 'Dielectric enhancement of sol-gel derived $BaTiO_3/ SrTiO_3$ multilayered thin films', Thin Solid Films, Vol. 406, p. 113, 2002