참고문헌
- LU S. H, P.R. Kumar, 'Distributed scheduling based on due dates and buffer priorities', IEEE Transactions on Automatic Control, 36, 1406-1416, 1991 https://doi.org/10.1109/9.106156
- Kim, Y. D., Kim, J. U., Lim, S. K. and Jun, H. B., 1998, 'Due-Date Based Scheduling and Control Policies in a Multiproduct Semiconductor Wafer Fabrication Facility,' IEEE Transactions on Semiconductor Manufacturing, Vol. 11, No. 1, pp. 155-164 https://doi.org/10.1109/66.661295
- Kim, Y. D., Kim, J. G., Choi, B. and Kim, H. U., 2001, 'Production Scheduling in a Semiconductor Wafer Fabrication Facility Producing Multiple Product Types with Distinct Due Dates,' IEEE Transactions on Robotics and Automation, Vol. 17, No. 5, pp. 589-598 https://doi.org/10.1109/70.964660
- Mason, S. J., Jin, S. and Wessels, C. M., 2004, 'Rescheduling Strategies for Minimizing Total Weighted Tardiness in Complex Job Shop,' International Journal of Production Research, Vol. 42, No. 3, pp. 613-628 https://doi.org/10.1081/00207540310001614132
- Watts, H., 2000, 'Improving Fab Performance,' Future Fab International, Vol. 9
- Robinson, J. K., 1998, 'Capacity Planning in a Semiconductor Wafer Fabrication Facility with Time Constraints between Process Steps,' Ph. D. Dissertation, Department of Mechanical and Industrial Engineering, University of Massachusetts, Amherst
- Nissanke, N., 1997, Realtime System, Prentice Hall, London
- Ramamritham, K. and Stankovic, J.A., 1994, 'Scheduling Algorithm and Operating Systems Support for Real-Time Systems,' Proceedings of the IEEE, Vol. 82, No. 1, pp. 55-67 https://doi.org/10.1109/5.259426
- Hall, N. G. and Sriskandarajah, C, 1996, 'A Survey of Machine Scheduling Problems with Blocking and No-Wait in Process,' Operations Research, Vol. 44, No. 3, pp. 510-525 https://doi.org/10.1287/opre.44.3.510
- Chen, H., Chu, C. and Proth, J. M., 1998, 'Cyclic Scheduling of a Hoist with Time Window Constraints,' IEEE Transactions on Robotics and Automation, Vol. 14, No. 1, pp. 144-152 https://doi.org/10.1109/70.660860
- Stankovic, J. A., Spuri, M., Ramamritham, K. and Buttazo, G. C., 1998, Deadline Scheduling for Real-Time Systems: EDF and Related Algorithms, Kluwer Academic Publishers, Norwell, MA
- Monch, L., Stehli, M. and Zimmerman, J., 2003, 'FABMAS: An Agent-Based System for Production Control of Semiconductor Manufacturing Processes,' in Proceedings of the First International Conference on Industrial Application of Holonic and Multi-Agent Systems, Prague, Czech Republic
- Monch, L. and Stehli, M., 2003, 'An Ontology for Production Control of Semiconductor Manufacturing Processes,' in Proceedings of the First German Conference on Multiagent System Technologies, Erfurt, Germany
- Wyns, J., 1999, 'Reference Architecture for Holonic Manufacturing Systems: The Key to Support Evolution and Reconfiguration,' Ph. D. Dissertation, Department of Mechanical Engineering, Katholieke Universiteit Leuven, Belgium
- Yu, C. Y. and Huang, H. P., 2001, 'Development of the Order Fulfillment Process in the Foundry Fab by Applying Disributed Multi-Agents on a Generic Message-Passing Platform,' IEEE/ASME Transactions on Mechatronics, Vol. 6, No. 4, pp. 387-398 https://doi.org/10.1109/3516.974852
- Cheng, F. T., Chang, C. F. and Wu, S. L., 2004, 'Development of Holonic Manufacturing Execution Systems,' Journal of Intelligent Manufacturing, Vol. 15, pp. 253-267 https://doi.org/10.1023/B:JIMS.0000018037.63935.a1
- Shen, W., 2002, 'Distributed Manufacturing Scheduling Using Intelligent Agents,' IEEE Intelligent Systems, Vol. 17, No. 1, pp. 88-94 https://doi.org/10.1109/5254.988492
- Yoon, H. J., 2004, 'Real-Time Scheduling of Semiconductor Integrated Single-Wafer Processing Tools,' Ph. D. Dissertation, Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
- Dechter, R., Meiri, I. and Pearl, J., 1991, 'Temporal Constraint Network,' Artificial Intelligence, Vol. 49, pp. 61-95 https://doi.org/10.1016/0004-3702(91)90006-6
- Schwalb, E. and Dechter, R., 1997, 'Processing Disjunction in Temporal Constraint Networks,' Artificial Intelligence, Vol. 93, pp. 29-61 https://doi.org/10.1016/S0004-3702(97)00009-X
- Kemp, K, Intel Five-Machine Six Step Mini-Fab Description, Intel/ASU Report [on-line]
- Yoon, H. J. and Lee, D. Y., 2000, 'A Control Method to Reduce the Standard Deviation of Flow Time in Wafer Fabrication,' IEEE Transactions on Semiconductor Manufacturing, Vol. 13, No. 3, pp. 389-392 https://doi.org/10.1109/66.857950
- Lu, S. H., Ramaswamy, D. and Kumar, P. R., 1994, 'Efficient Scheduling Policies to Reduce Mean and Variance of Cycle-Time in Semiconductor Manufacturing Plants,' IEEE Transactions on Semiconductor Manufacturing, Vol. 7, No. 3, pp. 374-388 https://doi.org/10.1109/66.311341
피인용 문헌
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- Data acquisition system of compound semiconductor fabrication vol.21, pp.12, 2007, https://doi.org/10.1007/BF03177475