References
- Saffert, E. and Kallenbach, E., 'Integrated Planar Drives and Their Applications,' Annals IEEE AMC 2000-Nagoya, pp. 3127 - 3131, 2000
- Holmes, M., Hocken, R. and Trumper, D., 'The longrange scanning stage : a novel platform for scannedprobe microscopy,' Precision Engineering, Vol. 24, pp. 191 - 209, 2000 https://doi.org/10.1016/S0141-6359(99)00044-6
- Sawyer, B., 'Actuating system,' U.S. Patent No. 3,857,078, 1974
- Yamazaki, K., Shimizu, T. and Kimura, G., 'Development of a new type surface actuator,' IEEE Conf. on Industrial Electronics, Control and Instrumentation, Vol. 1, pp. 509 - 513, 1994 https://doi.org/10.1109/IECON.1994.397830
- Fujii, N. and Fujitake, M., 'Two-Dimensional Drive Characteristics by Circular-Shaped Motor,' IEEE Trans. on Industry Applications, Vol. 35, No. 4, pp. 803 - 809, 1999 https://doi.org/10.1109/28.777187
- Tomita, Y. and Koyanagawa, Y., 'Study on a surface motor driven precise positioning system,' J. of Dynamic systems, measurement and control, Vol. 117,pp.311 - 319,1995 https://doi.org/10.1115/1.2799121
- Jung, K. S., Lee, S. H. and Baek, Y. S., 'Repulsive & Attractive Type Magnetic Levitation for Mechanical Isolation of the Planar Stage Mover,' Korea Society of Precision Engineering, Vol. 20, pp. 76 - 83, 2003
- Lee, S. and Gweon, D., 'A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air-bearings,' Precision Engineering, Vol. 24, pp. 24 - 31, 2000 https://doi.org/10.1016/S0141-6359(99)00022-7
- Melkote, H. and Khorrami, F., 'Closed-loop Control of a Base XY stage with Rotational Degree-of-Freedom for a High-Speed Ultra-Accurate Manufacturing System,' Proc. of IEEE Conf. on Robotics & Automation, Michigan, pp. 1812 - 1817, 1999 https://doi.org/10.1109/ROBOT.1999.770372
- Jung, K. S., Huh, J. H. and Baek, Y. S., 'Decoupling Control of Levitation and Thrust of The Transverse Flux Linear Induction Motor using DC-biased Multi Phase Inputs,' Korea Society of Mechanical Engineering A, Vol. 28, No. 11, pp. 1733 - 40, 2004 https://doi.org/10.3795/KSME-A.2004.28.11.1733