Transverse flux circumferential induction method as a driving principle of the contact-free revolving stage

비접촉 회전 스테이지에의 구동 원리로서의 횡자속 원주형 유도 방법

  • 김효준 (삼척대학교 기계공학과) ;
  • 정광석 (충주대학교 기계공학과)
  • Published : 2005.10.01

Abstract

Compared with linear induction principle, the transverse flux circumferential induction principle is suggested as a driving mechanism of the revolving stage, which can rotate contactlessly without any supporting structure. The stage realizes the integrated motion of levitation, rotation, and planar perturbation, using the two-axis forces, normally directed force of the air-gap and tangential force, of the induction drivers mounted on the stator uniformly. In this paper, the force generating mechanism of the stage is described in detail. First, the various core shapes generating the transverse flux are analyzed to guarantee the proper thrust force. And the vector force intensity of the circumferential induction driver constituting the stage is compared with that of the linear induction driver. Especially it is shown that the magnetic force of the suggested system can be modeled with the linear equivalent model, including the test verification.

Keywords

References

  1. Saffert, E. and Kallenbach, E., 'Integrated Planar Drives and Their Applications,' Annals IEEE AMC 2000-Nagoya, pp. 3127 - 3131, 2000
  2. Holmes, M., Hocken, R. and Trumper, D., 'The longrange scanning stage : a novel platform for scannedprobe microscopy,' Precision Engineering, Vol. 24, pp. 191 - 209, 2000 https://doi.org/10.1016/S0141-6359(99)00044-6
  3. Sawyer, B., 'Actuating system,' U.S. Patent No. 3,857,078, 1974
  4. Yamazaki, K., Shimizu, T. and Kimura, G., 'Development of a new type surface actuator,' IEEE Conf. on Industrial Electronics, Control and Instrumentation, Vol. 1, pp. 509 - 513, 1994 https://doi.org/10.1109/IECON.1994.397830
  5. Fujii, N. and Fujitake, M., 'Two-Dimensional Drive Characteristics by Circular-Shaped Motor,' IEEE Trans. on Industry Applications, Vol. 35, No. 4, pp. 803 - 809, 1999 https://doi.org/10.1109/28.777187
  6. Tomita, Y. and Koyanagawa, Y., 'Study on a surface motor driven precise positioning system,' J. of Dynamic systems, measurement and control, Vol. 117,pp.311 - 319,1995 https://doi.org/10.1115/1.2799121
  7. Jung, K. S., Lee, S. H. and Baek, Y. S., 'Repulsive & Attractive Type Magnetic Levitation for Mechanical Isolation of the Planar Stage Mover,' Korea Society of Precision Engineering, Vol. 20, pp. 76 - 83, 2003
  8. Lee, S. and Gweon, D., 'A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air-bearings,' Precision Engineering, Vol. 24, pp. 24 - 31, 2000 https://doi.org/10.1016/S0141-6359(99)00022-7
  9. Melkote, H. and Khorrami, F., 'Closed-loop Control of a Base XY stage with Rotational Degree-of-Freedom for a High-Speed Ultra-Accurate Manufacturing System,' Proc. of IEEE Conf. on Robotics & Automation, Michigan, pp. 1812 - 1817, 1999 https://doi.org/10.1109/ROBOT.1999.770372
  10. Jung, K. S., Huh, J. H. and Baek, Y. S., 'Decoupling Control of Levitation and Thrust of The Transverse Flux Linear Induction Motor using DC-biased Multi Phase Inputs,' Korea Society of Mechanical Engineering A, Vol. 28, No. 11, pp. 1733 - 40, 2004 https://doi.org/10.3795/KSME-A.2004.28.11.1733