Journal of Mechanical Science and Technology

  • 제19권9호
  • /
  • Pages.1711-1719
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  • 2005
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  • 1738-494X(pISSN)
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  • 1976-3824(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
권호 표지

Resonance Frequency and Quality Factor Tuning in Electrostatic Actuation of Nanoelectromechanical Systems

  • Kim, Dong-Hwan (School of Mechanical Design and Automation Engineering, Institute of Precision Machinery Technology, Seoul National University of Technology)
  • 발행 : 2005.09.01
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초록

In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly-clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nanoresonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.

키워드

참고문헌

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