Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of Iron Co-deposited Nickel on the Microstructures and Properties of Electroplated Nanocrystalline Nickel-iron Alloys

전착된 나노 결정질 니켈-철 합금의 미세구조 및 물성에 대한 철의 영향

  • Byun Myung-Hwan (Department of Materials Engineering, Hankuk Aviation University) ;
  • Cho Jin-Woo (Korea Electronics Technology Institute) ;
  • Song Yo-Seung (Department of Materials Engineering, Hankuk Aviation University)
  • 변명환 (한국항공대학교 항공재료공학과 표면처리연구실) ;
  • 조진우 (전자부품연구원 나노정보에너지센터) ;
  • 송용승 (한국항공대학교 항공재료공학과 표면처리연구실)
  • Published : 2005.08.01
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Abstract

Nickel-iron nanocrystalline alloys with different compositions and grain sizes were fabricated by electro-plating for MEMS devices. The iron content of the deposits was changed by varying the nickel/iron ion ratio in the electrolyte. X-ray diffraction (XRD) analysis was applied for measuring the strength of the texture and grain size of the deposits. The nickel/iron atom ratio of the deposits was analyzed by EDS. The hardness of the alloys was evaluated by Vickers hardness indenter. The internal stress of the deposits was measured by Thin Film Stress Measurement using Stoney's formula. Surface morphology and roughness were investigated by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The results of this study revealed that at a grain size of approximately $17\~24$nm the hardness, internal stress and roughness depend strongly on the iron content. With increasing the iron content, the hardness and internal stress of the deposits increased. An excellent correlation between the increase in the internal stress and the loss of (200) texture was found.

Keywords

References

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