초록
In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with $0.3\~1.2\;mm{\Phi}$, number of turns with $4\~12$ turns, distance with $40\~120$ mm and RF power with $10\~150$ W, the electrical and optical properties were measured. When diameter of coil was $0.3\;mm{\Phi}$, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 $cd/m^2$ was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was shown by mode transition from E-mode to H-mode.
