대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

DC 마그네트론 스퍼터링 장치의 영구자석에 의한 자기장의 2차원 해석적 해

Two-dimensional Analytic Solution of the Magnetic Field for the Ferrites of DC Magnetron Sputtering Device

  • 발행 : 2005.07.01
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초록

We obtain analytical expressions the magnetic field of ferrites for DC magnetron sputtering device, which has been widely used for vacuum thin film deposition, and suggested the equation on maximum radius of the magnetic field by analytic solution. Also, the analytic results are compared with some calculations using magnetization elements of right-angled hexahedron.

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참고문헌

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