JSTS:Journal of Semiconductor Technology and Science

  • 제5권1호
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  • Pages.30-37
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  • 2005
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  • 1598-1657(pISSN)
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  • 2233-4866(eISSN)
대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

Fabrication of Electrochemical Sensor with Tunable Electrode Distance

  • Yi, Yu-Heon (Department of BioSystems, Korea Advanced Institute of Science and Technology) ;
  • Park, Je-Kyun (Department of BioSystems, Korea Advanced Institute of Science and Technology)
  • 발행 : 2005.03.31
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초록

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

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참고문헌

  1. S.K.Kim, J.H.Thomas, P.J.Hesketh, C.Li, B.H.Halsall, W.R.Heineman, 'Comb Interdigitated Arrays (IDA) Electrodes for More Rapid and Sensitive Bead-based Immunoassay,' IEEE MEMS, pp. 435-438, 2003 https://doi.org/10.1109/MEMSYS.2003.1189779
  2. R.Kurita, H.Tabei, Z.Liu, T.Horiuchi, and O.Niwa, 'Fabrication and electrochemical properties of an interdigitated array electrode in a microfabricated wall-jet cell,' Sensors and Actuators, Vol. B 71, pp. 82-89, 2000 https://doi.org/10.1016/S0925-4005(00)00608-0
  3. O.Niwa, Y.Xu, H.B.Halsall, and W.R.Heineman, 'Small-Volume Voltammetric Detection of 4-Aminophenol with Interdigitated Array Electrodes and Its Application to Electrochemical Enzyme Immunoassay,' Anal. Chem.,Vol. 65, pp. 1559-1563, 1993 https://doi.org/10.1021/ac00059a013
  4. M.Morita, O.Niwa, and T.Horiuchi, 'Interdigitated array microelectrodes as electrochemical sensors,' Electrochinica Acta, Vol. 42, pp. 3177-3183, 1997 https://doi.org/10.1016/S0013-4686(97)00171-0
  5. O.Niwa, M.Morita, and H.Tabei, 'Electrochemical Behavior of Reversible Redox Species at Interdigitated Array Electrodes with Different Geometries: Consideration of Redox Cycling and Collection Efficiency,' Anal. Chem., Vol. 62, pp. 447-452, 1990 https://doi.org/10.1021/ac00204a006
  6. A.E.Cohen, R.R.Kunz, 'Large-area interdigitated array microelectrodes for electrochemical sensing,' Sensors and Actuators, Vol. B 62, pp. 23-29, 2000 https://doi.org/10.1016/S0925-4005(99)00372-X
  7. H.Schift, R.W.Jaszewski, C.David, and J.Gobrecht, 'Nanostructuring of Polymers and Fabrication of Interdigitated Electrodes by Hot Embossing Lithography,' Microelectronic Engineering, Vol. 46, pp. 121-124, 1999 https://doi.org/10.1016/S0167-9317(99)00030-1
  8. J.H.Thomas, S.K.Kim, P.J.Hesketh, H.B.Halsall, and W.R.Heineman, 'Microbead-based electrochemical immunoassay with interdigitated array electrodes,' Analytical Biochemistry, Vol. 328, pp. 113-122, 2004 https://doi.org/10.1016/j.ab.2004.02.020
  9. N.Honda, K.Emi, T.Katagiri, T.Irita, S.Shoji, H.Sato, T.Homma, T.Osaka, M.Saito, J.Mizuno, Y.Wada, '3-D Comb Electrodes for Amperometric Immuno Sensors,' IEEE Transducers, pp. 1132-1135, 2003 https://doi.org/10.1109/SENSOR.2003.1216969
  10. A.E.Olsen, 'Bright Acid Sulfate Copper Plating,' AESF Illustrated lectures, 1995
  11. http://cancer.rutgers.edu/stg_lab/protocols/Phosphate%20buffer.htm
  12. M.Lambrechts and W.Sansen, Biosensors; 'Microelectrochemical Devices,' IOP Publishing, pp. 6-10, 82-93, 192-194, 1992
  13. G.L.Long and J.D.Winefordner, 'Limits of Detection: Are They Real?' Anal. Chem., Vol. 55, 712A, 1983 https://doi.org/10.1021/ac00258a001
  14. Skoog, Holler, and Nieman, 'Principles of Instrumental Analysis, 5th edition,' Harcourt College Publishers, pp. 12-14, 1996