대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

평판형 유도결합 플라즈마원의 등가회로 모델 정립

Establishment of Equivalent Circuit Model about Planar-type Inductively Coupled Plasma Sources

  • 발행 : 2005.05.01
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⟨ 이전 논문 다음 논문 ⟩

초록

Impedance matching characteristics of planar type inductively coupled plasma sources are investigated utilizing the previously reported two-dimensional theory[1] of the anomalous skin effect. Two types of matching networks are considered, and the values of the circuit elements are expressed as functions of various reactor parameter. Also, two cases of perfect and imperfect matching conditions are considered and the functional dependence of the values of matching capacitance and reflection coefficient on the various reactor parameters are investigated using the present circuit model.

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참고문헌

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