Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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The stable e-beam deposition of metal layer and patterning on the PDMS substrate

PDMS 기판상에 금속층의 안정적 증착 및 패터닝

  • Published : 2005.11.30
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Abstract

In this paper, we proposed the fabrication process of the stable e-beam evaporation and the patterning of metals layer on the polydimethylsiloxane (PDMS) substrate. The metal layer was deposited under the various deposition rate, and its effect to the electrical and mechanical properties (e.g.: adhesion-strength of metal layer) was investigated. The influence of surface roughness to the adhesion-strength was also examined via the tape test. Here, we varied the roughness by changing the reactive ion etching (RIE) duration. The electrode patterning was performed through the conventional photolithography and chemical etching process after e-beam deposition of $200{\AA}$ Ti and $1000{\AA}$ Au. As a result, the adhesion strength of metal layer on the PDMS surface was greatly improved by the oxygen plasma treatment. The e-beam evaporation on the PDMS surface is known to create the wavy topography. Here, we found that such wavy patterns do not effect to the electrical and mechanical properties. In conclusion, the metal patterns with minimum $20{\mu}m$ line width was produced well via the our fabrication process, and its electrical conductance was almost similar to the that of metal patterns on the silicon or glass substrates.

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References

  1. N. Pavesic, J. Gros, S. Dobrisek, and F. Mihelic, 'Homer Il-man-machine interface to internet for blind and visually impaired people', Comput. Commun., vol. 26, no. 5, pp. 438-443, 2003 https://doi.org/10.1016/S0140-3664(02)00164-0
  2. S. M. Lawrence, G S. Dhillon, and K. W. Horch, 'Fabrication and characteristics of an implantable, polymer-based, intrafascicular electrode', J. Neurosci. Methods, vol. 131, no 1-2, pp. 9-26, 2003 https://doi.org/10.1016/j.jneumeth.2003.06.001
  3. T. Schanzea, H. G. Sachs, C. Wiesenack, U. Brunner, and H. Sailer, 'Implantation and testing of subretinal film electrodes in domestic pigs', Exp. Eye Res., In Press, Corrected Proof, Available online 25 August 2005
  4. K. Lee, A. Singh, J. He, S. Massia, B. Kim, and G. Raupp, 'Polyimide based neural implants with stiffness improvement', Sens. Actuators B, vol. 102, no. 1, pp. 67-72, 2004 https://doi.org/10.1016/j.snb.2003.10.018
  5. Y. Matsubara, Y. Murakami, M. Kobayashi, Y. Morita, and E. Tamiya, 'Application of on-chip cell cultures for the detection of allergic response', Biosens. Bioelectron., vol. 19, no. 7, pp. 741-747, 2004 https://doi.org/10.1016/j.bios.2003.08.001
  6. J. Y. Baek, J. Y. Park, J. I. Ju, T. S. Lee, and S. H. Lee, 'A pneumatically controllable flexible and polymeric microfluidic valve fabricated via in situ development', J. Micromech. Microeng., vol. 15, no. 5, pp. 1015-1020, 2005 https://doi.org/10.1088/0960-1317/15/5/017
  7. 고용득, 정광진, 최성호, 구경완, 조동율, 천희곤, '$SF_6$ 와 $SF_6-N_2$ 가스를 이용한 텅스텐 박막의 플라즈마 식각에 관한 연구', 센서학회지, 제8권, 제3호, pp. 291-297, 1999
  8. N. Bowden, S. Brittain, A. G. Evans, J. W. Hutchinson, and G. M, Whitesides, 'Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer', Nature, vol. 393, no, 6681, pp. 146-149, 1998 https://doi.org/10.1038/30193
  9. G. C. Martin, T. T. Su, L H. Loh, E. Balizer, S. T. Kowel, and P. Kornreich, 'The metallization of silicone polymers in the rubbery and the glassy state', J. Appl. Phys., vol. 53, no. 1, pp. 797-799, 1982 https://doi.org/10.1063/1.329995
  10. S. Wagner, S. P. Lacour, J. Jones, P. I. Hsu, J. C. Sturm, T. Li, and Z. Suo, 'Electronic skin: architecture and components', Physica E, vol. 25, no. 23, pp. 326-334, 2004 https://doi.org/10.1016/j.physe.2004.06.032
  11. G. Y. Ahn, S. I. Park, I. B. Shim, Y. S. Cho, and C. S. Kim, 'Magnetoresistance and surface properties with deposition condition for La-Sr-Mn-O thin films', Phys. Stat. Sol. B, vol. 241, no. 7, pp. 1561-1564, 2004 https://doi.org/10.1002/pssb.200304673
  12. 정귀상, 노상수, '측온저항체 온도센서용 Pt-Co 합금박막의 증착과 특성에 관한 연구', 센서학회지, 제 7권, 제1호, pp. 45-50, 1998