Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of a hygroscopic polymer-coated QCM humidity sensor and its characteristics

감습 고분자막이 코팅된 수정미소저울 습도센서 제작 및 특성연구

  • Kwon, Su-Yong (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Kim, Jong-Chul (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Choi, Byung-Il (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Nham, Hyun-Soo (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
  • 권수용 (한국표준과학연구원 물리표준부 온습도그룹) ;
  • 김종철 (한국표준과학연구원 물리표준부 온습도그룹) ;
  • 최병일 (한국표준과학연구원 물리표준부 온습도그룹) ;
  • 남현수 (한국표준과학연구원 물리표준부 온습도그룹)
  • Published : 2005.11.30
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Abstract

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

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References

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