Abstract
PZT(30/70) thick film was fabricated by using 1,3 propanediol-based sol-gel method. Prepared film of pyroelectric property was investigated by Dynamic method of modulation frequency dependence. Pyroelectric coefficient was obtained about $5.0{\times}10^{-8}\;C/cm^2{\cdot}K$. The figure of merits for voltage responsively and specific detectivity were $3.4{\times}10^{-11}\;C{\cdot}cm/J$ and $5.9{\times}10^{-9}\;C{\cdot}cm/J$, respectively, because of relative high-dielectric constant and high-pyroelectric coefficient. Voltage responsively was increased at low modulation frequency and it was decreased at high modulation frequency. Voltage responsively was maximum 1.84 V/W at 10Hz. As Johnson noise is dominant, Noise voltage was increased nearly proportional to $f^{-1/2}$. Noise equivalent power and specific detectivity were $2.83{\times}10^{-7}\;W/Hz^{1/2}$ and 3.13{\times}10^5\;cm{\cdot}Hz^{1/2}/W$ the same frequency at 80Hz, respectively.
1,3 propanediol 을 이용한 sol-gel 방법으로 PZT(30/70) 후막을 제작하였다. 제작된 film 의 초전특성은 dynamic 방법을 이용하여 변조 주파수 의존성을 조사하였다. 초전계수 (pyroelectric coefficient) 는 약 $5.0{\times}10^{-8}\;C/cm^2{\cdot}K$를 나타내었다. 전압감도와 비검출능에 대한 재료평가지수는 비교적 높은 유전률과 높은 초전계수로 인해 각각 $3.4{\times}10^{-11}\;C{\cdot}cm/J$과 $5.9{\times}10^{-9}\;C{\cdot}cm/J$을 나타내었다. 전압감도는 저주파 영역에서 증가하다가 고주파 영역에서는 주파수에 반비례하는 경향을 보이며, 10Hz에서 최대값 1.84 V/W를 나타내었다. 잡음전압은 Johnson 잡음의 영향으로 거의 $f^{-1/2}$ 에 비례하여 증가하였다 잡음등가전력과 비검출능은 같은 주파수 80Hz 에서 각자 $2.83{\times}10^{-7}\;W/Hz^{1/2}$ 과 3.13{\times}10^5\;cm{\cdot}Hz^{1/2}/W$를 나타내었다.
