한국산업융합학회 논문집 (Journal of the Korean Society of Industry Convergence)
- 제7권3호
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- Pages.259-263
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- 2004
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- 1226-833X(pISSN)
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- 2765-5415(eISSN)
청정도 가스 이송용 재료의 특성과 전해연마에 관한 연구
A Study on the Characteristics of Electro Polishing and Utility Materials for Transit High Purity Gas
- Lee, Jong-Hyung (School of Mechanical Engineering, KIT) ;
- Park, Shin-Kyu (Dae Gu Polytechnic College) ;
- Yang, Seong-Hyeon (AUTO114 Co Kr)
- 투고 : 2004.02.02
- 심사 : 2004.08.20
- 발행 : 2004.08.31
초록
In the manufacture progress of LCD or semiconductor, there are used many kinds of gas like erosion gas, dilution gas, toxic gas as a progress which used these gas there are required high puritize to increase accumulation rate of semiconductor or LCD materials work progress of semiconductor or LCD it demand many things like the material which could minimize metallic dust that could be occured by reaction between gas and transfer pipe laying material, illumination of the surface, emition of the gas, metal liquation, welding etc also demand quality geting stricted. Material-Low-sulfur-contend (0.007-0010), vacuum-arc-remelt(VAR), seamless, high-purity tubing material is recommend for enhance welding lower surface defect density All wetted stainless steel surface must be 316LSS elecrto polishinged with