DOI QR코드

DOI QR Code

Micro/Nano Adhesion and Friction Properties of Mixed Self-assembled Monolayer

혼합 자기 조립 단분자막의 마이크로/나노 응착 및 마찰 특성

  • 윤의성 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 오현진 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 한흥구 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 장경영 (한양대학교 기계공학부)
  • Published : 2004.04.01

Abstract

Micro/nano adhesion and friction properties of mixed self-assembled monolayer (SAM) with different chain length for MEMS application were experimentally studied. Many kinds of SAM having different spacer chains(C6, C10 and C18) and their mixtures (1:1) were deposited onto Si-wafer, where the deposited SAM resulted in the hydrophobic nature. The adhesion and friction properties between tip and SAM surfaces under nano scale applied load were measured using an atomic force microscope (AFM) and under micro scale applied load were measured using ball-on-flat type micro-tribotester. Surface roughness and water contact angles were measured with SPM (scanning probe microscope) and contact anglemeter. Results showed that water contact angles of mixed SAMs were similar to those of pure SAMs. The morphology of coating surface was roughened as mixing of SAM. Nano adhesion and nano friction decreased as increasing of the spacer chain length and mixing of SAM. Micro friction was decreased as increasing of the spacer chain length, but micro friction of mixed SAM showed the value between pure SAMs. Nano adhesion and friction mechanism of mixed SAM was proposed in a view of stiffness of spacer chain modified chemically and topographically.

Keywords

References

  1. Tai, Y.C., Fan, L.S. and Muller, R.S., 'IC-Processed Journal of the KSTLE Micro-Motors: Design, Technology and Testing,' Proc. IEEE Micro Electro Mechanical Systems, pp.1-6,1989
  2. Deng, K., Collins, R.J., Mehregany, M. and Sukenik, CN., 'Perfonnance Impact of Monolayer Coatings of Polysilicon Micromotors,' Proc. MEMS 95, Amsterdam, Netherlands, Jan-Feb
  3. Maboudian, R., Ashurst, W.R. and Carraro, C, 'Self-assembled monolayers as anti-stiction coatings for MEMS,' Sensors and Actuators A: Physical, vol. 82,pp. 219-223, 2000
  4. Maboudian, R., 'Surface processes in MEMS tech-nology,' Surface Science Reports, Vol. 30, pp. 207-269, 1998
  5. Carraro, C, Yauw, O.w., Sung, M.M. and Mabou-dian, R., 'Observation of Three Growth Mechanism in Self-Assembled Monolayers,' The Journal of Physical Chemistry B, Vol. 102, No. 23, 1998
  6. Kluth, G.J., Sander, M., Sung, M.M. and Maboudian, R., 'Study of the desorption mechanism of alkylsi-loxane self-assembled monolayers through iso-topic labeling and high resolution electron energy-loss spectroscopy experiments,' J. Vac. Sci. Techno!. A, Vol. 16, No.3, pp. 932-936, 1998
  7. Kluth, G. J., Sung, M.M. and Maboudian, R., 'Inter-action of H(D) Atoms with Octadecylsiloxane SelfAssembled Monolayers on the Si(100) Surface,'Langmuir, Vol. 13, on the Si(100) Surface,' Lang-muir, Vol. 13, pp. 6491-6496, 1997
  8. Kato, K., Koide, H. and Umehara, N., 'Micro-Wear Properties of Carbon Nitride Coatings,' Wear, Vol. 238,pp.40-44, 2000
  9. 오현진, 윤의성, 한흥구, 공호성, 장경영, 'IBAD 방법으로 코팅된 PTFE 박막의 마이크로/나노 옹창 및 마찰 특성,' 제 36회 한국윤활학회 춘계학술대회 논문집, pp. 55-62, 2003
  10. Ando, Y. and Ino, J., 'Friction and pull-off force on silicon surface modified by FIB,' Sensors and Actua tors A, Vol. 57, pp. 83-89, 1996
  11. Ando, Y. and Ino, J., 'Friction and pull-off forces on submicron-size asperities,' Wear, Vol. 216, pp. 115-122, 1998
  12. Maboudian, R. and Roger, T. Howe, 'Critical Review: Adhesion in surface micromechanical struc-tures,' J. Vac. Sci. Technol. B, vol. 15 (1), pp. 1-20,1997
  13. 윤의성, 박지현, 양승호, 공호성, 'SPM을 이용한 접촉조건 변화에 따른 미소응착 특성 연구,' 한국윤활학회지, 제17권, 제3호, pp. 191-197, 2001
  14. 윤의성, 박지현, 양승호, 한흥구, 공호성, 'OTSSAM의 미소응착 특성에 관한 실험적 연구.' 한국윤활학회지, 제 17권, 제4호, pp. 276-282, 2001
  15. 윤의성, 박지현, 양승호, 공호성, 장경영, ' IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성.' 한국윤활학회지, 제18권, 1호, pp.1-8, 2002
  16. Liu, H. and Bhushan, B., 'Investigation of nanotribo-logical properties of self-assembled monolayers with alkyl and biphenyl spacer chains,' Ultramicroscopy,Vol. 91, Issues 1-4, May, pp. 185-202, 2002