References
- Muray, L. P,. Spallas, J. P., Stebler, C, Lee, K., Mankos, M., Hsu, Y. and Gmur, M., 2000, 'Advances in Arrayed Microcolumn Lithography,' J. of Vac. Sci. Technol., B, Vol. 18, No. 6, pp. 3099-3104 https://doi.org/10.1116/1.1321760
- Akeno, K., Ogasawara, M. and Tojo, T., 2002, 'Mechanical System Construction for the EX-11 Electron Beam Mask Writer: A Solution for 100 nm Wafer Lithography,' J. Vac. Sci. Technol, B Vol. 20, No. 1, pp. 311-315 https://doi.org/10.1116/1.1446452
- Kunioka, T., Takeda, Y. and Matsuda, T., 1999, 'XY Stage Driven by Ultrasonic Linear Motors for the Electron-Beam X-Ray Mask Writer EB-X3,' J. Vac. Sci. Technol, B Vol. 17, No. 6, pp. 2917-2920 https://doi.org/10.1116/1.591096
- Hu, H. and Mrad, R. B., 2003, 'On the Classical Preisach Model for Hysteresis in Piezoceramic Actuators,' Mechatronics, Vol. 13, No. 2, pp. 85-94 https://doi.org/10.1016/S0957-4158(01)00043-5
- Ge, P. and Jouaneh, M., 1995, 'Modeling Hysteresis in Piezoceramic Actuators,' Precision Engineering, Vol. 17, No. 3, pp. 211-221 https://doi.org/10.1016/0141-6359(95)00002-U
- M. Goldfarb, N. Celanovic, 'Modeling piezoelectric stack actuators for control of micromanipulation', IEEE Contr. Syst. Mag., vol. 17, pp. 69-79,1997 https://doi.org/10.1109/37.588158
- Krejci, P. and Kuhnen, K., 2001, 'Inverse Control of Systems with Hysteresis and Creep,' IEE Proc. Control Theory Appl., Vol. 148, No. 3, pp. 185-192 https://doi.org/10.1049/ip-cta:20010375
- H. Adriaens, W. Koning, R. Banning, 'Modeling piezoelectric actuators', IEEE/ASME Trans. an Mechatronics, vol. 5, no. 4, 2000 https://doi.org/10.1109/3516.891044
- Banning, R., et al., 2001, 'State-Space Analysis and Identification for a Class of Hysteretic Systems,' Automatica, Vol. 37, pp. 1883-1892 https://doi.org/10.1016/S0005-1098(01)00157-1
- Jung, S.-B., Park, J.-H. and Kim, S.-W., 1994, 'Nonlinear Modeling of Piezoelectric Actuators for Scanning Tunneling Microscopy,' Transaction of the KSME A, Vol. 18, No. 9, pp. 2272-2283
- Micropositioning, Nanopositioning, Nanoautomation, Physik Instrumente
- Jung, H. and Gweon, D.-G, 2000, 'Creep Characteristics of Piezoelectric Actuators,' Review of Scientific Instruments, Vol. 71, No. 4, pp. 1896-1900 https://doi.org/10.1063/1.1150559
- Park, J., Jung, J., Huh, K. and Chung, C. C, 2003, 'Dynamic Analysis of the Piezo-Actuator for a New Generation Lithography System,' Transaction of the KSME (A), Vol. 27, No. 3, pp. 472-477 https://doi.org/10.3795/KSME-A.2003.27.3.472
- Lawrence, K. L., 2002, ANSYS Tutorial, SDC Publications
- RecurDyn User's Manual, FunctionBay, Inc
- Ljung, L., 2000, System Identification Toolbox User's Guide, The Math Works, Inc.
- Yoo, G, 2003, Development of a Nano-Stage Simulation Tool for the Advanced Lithography System, Master's Thesis, Hanyang University, Seoul, Korea