Progress in Superconductivity and Cryogenics (한국초전도ㆍ저온공학회논문지)

The Korean Society of Superconductivity and Cryogenics (한국초전도저온학회)
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Fabrication of YB $a_2$C $u_3$ $O_{7-x}$ film on a (100) SrTi $O_3$ single crystal substrate by single liquid source MOCVD method

(100) SrTi $O_3$ 단결정 기판위에 단일 액상 원료 MOCVD 법에 의한 YB $a_2$C $u_3$ $O_{7-x}$ 박막 제조

  • 전병혁 (한국원자력연구소 원자력재료기술개발부) ;
  • 최준규 (한국원자력연구소 원자력재료기술개발부) ;
  • 김호진 (성균관대 신소재공학과 & 원자력연구소) ;
  • 김찬중 (한국원자력연구소 원자력재료기술개발부)
  • Published : 2004.09.01
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Abstract

YB $a_2$C $u_3$$O_{7-x}$ (YBCO) films were deposited on (100) SrTi $O_3$ single crystal substrates by a metal organic chemical vapor deposition (MOCVD) system of hot-wall type using single liquid source. Under the condition of the mole ratio of Y(tmhd)$_3$:Ba(tmhd)$_2$:Cu(tmhd)$_2$= 1:2.1:2.9. the deposition pressure of 10 Torr. the MO source line speed of 15 cm/min. the Ar/ $O_2$ flow rate of 800/800 sccm. YBCO films were prepared at the deposition temperatures of 780∼89$0^{\circ}C$. In case of the YBCO films with 2.2 ${\mu}{\textrm}{m}$ thickness deposited for 6 minutes at 86$0^{\circ}C$. XRD pattern showed complete c-axis growth and SEM morphology showed dense and crack-free surface. The atomic ratios of Ba/Y and Cu/Ba in the film were 1.92 and 1.56. respectively. The deposition rate of the film was as high as 0.37 ${\mu}{\textrm}{m}$/min. The critical temperature ( $T_{c.zero}$) of the film was 87K. The critical current of the film was 104 A/cm-width. and the critical current density was 0.47 MA/$\textrm{cm}^2$. For the thinner film of 1.3 ${\mu}{\textrm}{m}$ thickness. the critical current density of 0.62 MA/$\textrm{cm}^2$ was obtained.d.

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References

  1. A. Goyal. D. P. Norton. J. D. Budai. M. Paranthaman, E. D. Specht, D. M. Kroeger. D. K Christen, Q. He. B. Saffian. F. A. List. D. F. Lee. P. M. Martin. C. E. Klaubunde. E. Harfield. V. K.Sikka, 'High critical current density superconducting tapes by epitaxial deposition of $YB_{a2}$$CU_3$$O_x$ thick films on biaxially textured metals', Appl. Phys. Lett. 69 (12), pp.1795-1797, 1996
  2. Y. Iijima. N. Tanabe. O. Kohno. Y. Ikeno, 'In-plane aligned $YB_{a2}$$CU_3$$O_{7-x}$ thin films deposited on polycrystalline metallic substrates'. Appl. Phys. Lett. 60 (6). pp. 769-771. 1992
  3. A. D. Berry. D. K. Gaskill, R. T. Holm, E. J. Cukauskas. R. Kaplan and R. L. Henry. 'Formation of high $T_c$ superconducting films by organometallic chemical vapor deposition'. Appl. Phys. Lett. 52 (20). pp. 1743-1745. 1988
  4. K Onabe. T. Doi, N. Kashima. S. Nagaya. T. Saitoh. 'Preparation of $YB_{a2}$$CU_3$$O_x$superconducting tape formed on silver substrate by chemical vapor deposition technique'. Physica C. 378-381. pp. 907-910. 2002
  5. O. Stadel. J. Schmidt, G. Wahl. F. Weiss. D. Selbmann, J. Eickemeyer, O. Yu. Gorbenko. A. R. Kaul. C. Jimenez. 'Continuous YBCO deposition by MOCVD for coated conductors'. Physica C. 372-376. pp. 751-754. 2002
  6. S. Donet, F. Weiss, J. P. Senateur. P. Chaudouet. A. Abrutis. A. Teiserskis. Z. Saltyte. D. Selbmann, J. Eickemeyer, O. Stadel. G. Wahl. C. Jimenez, U. Miller. 'YBCO films on buffered Ni RABiT substrates by pulsed injection MOCVD'. Physica C. 372-376, pp. 652-655. 2002
  7. M. Doudkowsky, J. Santiso, S. Berton. A. Figueras, J. Bassas, 'Barium incorporation inc-axis oriented YBCO thin films deposited by metalorganic chemical vapor deposition' Physica C, 288, pp, 1-9, 1997
  8. J, Hudner, O, Thomas, E, Mossang, P. Chaudouet. F. Weiss. D, Boursier. J, P.Senateur. M, Ostling, and A. Gaskov, 'Thin-film growth and compositional effects in $YB_{a2}$$CU_3$$O_{7-x}$ layers prepared by metalorganic chemical vapor deposition'. J. Appl. Phys. 74 (7), pp. 4631-4641. 1993
  9. Y. Q. Li. J. Zhao, C. S. Chern, P. Lu, B. Gallois. P. Norris. B. Kear and F. Cosandey. 'Effects of composition on microstructure and superconducting properties of $YB_{a2}$$CU_3$$O_{7-x}$ thin films prepared by plasma enhanced metalorganicchemical vapor deposition', Physica C. 195. pp. 161-170, 1992