Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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Fatigue Test of MEMS Device: a Monolithic Inkjet Print

  • Park, Jun-Hyub (Department of Mechatronics Engineering, College of Engineering) ;
  • Oh, Yong-Soo (MEMS Lab, Samsung Advanced Institute of Technology, Tongmyong University of Information Technology)
  • Published : 2004.05.01
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Abstract

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

Keywords

References

  1. Aden, J. S. and Kahn, J. A., 1989, 'Thin Film Device for an Ink Jet Printhead and Process for the Manufacturing,' United States Patent, Patent No. 4, 809, 428
  2. Chang, L. S., 1989, 'Mechanisms of Failure of Thermal Ink-Jet Thin Film Devices under Stressed Conditions,' Proceedings of the SID, Vol. 30/1, pp. 57-63
  3. Chang, L. S., Gendler, P. L. and Jou, J. H., 1991, 'Thermal, Mechanical and Chemical Effects in the Degradation of the Plasma-Deposited ${\alpha}$-SiC : H passivation Layer in a Multilayer Thin-Film Device,' Journal of Materials, Science 26, pp. 1882-1890 https://doi.org/10.1007/BF00543619
  4. Kamisuki, S., Fujii, M., Takekoshi, T., Tezuka, C. and Atobe, M., 2000, 'A High Resolution, Electrostatically-Driven Commercial Inkjet Head,' Proc. of IEEE, The 13th Annual International Wordshop on Micro Electro Mechanical Systems, Miyazaki, Japan, January, pp. 793-798 https://doi.org/10.1109/MEMSYS.2000.838619
  5. Kolpekwar, A. and Blanton, R. D., 1997, 'Development of a MEMS Testing Methodology,' Proc. International Test Conference IEEE, pp. 923-931 https://doi.org/10.1109/TEST.1997.639707
  6. Krause, P., Obermeier, E. and Wehl, W., 1995, 'Backshooter-A New Smart Micromachined Single-Chip Inkjet Printhead,' Digest of Technical Papers of The 8th International Conference on Solid-State Sensors and Actuators, Vol. 2, Stockholm, Sweden, pp. 325-328 https://doi.org/10.1109/SENSOR.1995.721812
  7. Lee, C. S., Na, K. W., Maeng, D. J., Kuk, K. and Oh, Y. S., 2001, 'A Micromachined Monolithic Inkjet Print Head with Dome Shape Chamber,' The 11th International Conference on Solid-State Sensorss and Actuators, Transducers'01, Eurosensors XV, pp. 902-905
  8. Lee, S. W., Kim, H. C., Kuk, K. and Oh, Y. S., 2001, 'A Monolithic Inkjet Print Head : Domejet,' Technical Digest of 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, pp. 515-518 https://doi.org/10.1109/MEMSYS.2001.906592
  9. Maeng, D. J., Kuk, K., Lee, C. S., Na, K. W. and Oh, Y. S., 2001, 'Performance Improvement in DomeJet Inkjet Print Head by Measuring Temperature of Heater,' The 11th International Conference on Solid- State Sensors and Actuators, Transducers'01, Eurosensors XV, pp. 910-913
  10. Moor, P. D., Witvrouw, A., Simons, V. and Wolf, I. D., 1999, 'The Fabrication and Reliability Testing of Ti/TiN Heaters,' Part of the SPIE Conference on Micromachining and Microfabrication Process Technology V, pp. 284-293
  11. Park, S. J., Kim, M. S., Lee, J. S. and Lee, W. I., 2002, 'A Semi-Implicit Method for the Analysis of Two-Dimensional Fluid Flow with Moving Free Surfaces,' KSME International Journal, Vol. 16, No. 5, pp. 720-731 https://doi.org/10.1007/BF03184822
  12. Shibata, S., Kanamori, T. and Tsuruoka, T., 1989, 'Development of Heating Resistor for Versatile Thermal Print Heads,' IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 12, No. 13, pp. 358-364 https://doi.org/10.1109/33.35483
  13. Tanner, D. M. J., Walraven, A., Helgesen, K., Irwin, L. W., Gregory, D. L., Stake, J. R. and Smith, N. F., 2000, 'MEMS Reliability in Vibration Environments,' Proc. 38th Annual International Reliability Physics Symposium, pp. 139-145
  14. Tanner, D. M., Smith, N. F., Bowman, D. J., Eaton, W. P. and Peterson, K. A., 1997, 'Firs Reliability Test of a Surface Micromachinned Microengine Using SHiMMeR,' Proceedings SPIE Symposium on Micromachinning and Microfabrication, Vol. 3224, Austin, pp. 14-23
  15. Tseng, F., Kim, C. J. and Ho, C., 1998, 'A Novel Microinkjector with Virtual Chamber Neck,' Proceedings of IEEE, The 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, January, pp. 57-62
  16. Usui, M., 1996, 'Development of the New MACH,' Proc. of 12th International Congress on Advances in Non-Impact Printing, pp. 50-53