Journal of Mechanical Science and Technology

  • 제18권5호
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  • Pages.789-797
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  • 2004
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  • 1738-494X(pISSN)
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  • 1976-3824(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
권호 표지

Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

  • Kim, Deok-Ho (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Kim, Byungkyu (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Park, Jong-Oh (Microsystem Research Center, Korea Institute of Science and Technology)
  • 발행 : 2004.05.01
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초록

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

키워드

참고문헌

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