대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

초경합금기판 위에 성장되는 다이아몬드 막의 특성

Characteristics of Diamond Films Deposited on Cemented Tungsten Carbide Substrate

  • 김봉준 (경남대학교 전기공학과) ;
  • 박상현 (경남대학교 전자전기공학) ;
  • 박재윤 (경남대학교 전자전기공학부)
  • 발행 : 2004.07.01
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⟨ 이전 논문 다음 논문 ⟩

초록

Diamond films were deposited on the cemented tungsten carbide WC-Co cutting insert substrates by using both microwave plasma chemical vapor deposition(MWPCVD) and radio frequency plasma chemical vapor deposition (RFPCVD) from $CH_4$$-H_2$$-O_2$ gas mixture. Scanning electron microscopy and X-ray diffraction techniques were used to investigate the microstructure and phase analysis of the materials and Raman spectrometry was used to characterize the quality of the diamond coating. Diamond films deposited using MWPCVD from $CH_4$$-H_2$$-O_2$ gas mixture show a dense, uniform, well faceted and polycrystalline morphology. The compressive stress in the diamond film was estimated to be (1.0∼3.6)$\pm$0.9 GPa. Diamond films which were deposited on the WC-Co cutting insert substrates by RFPCVD from $CH_4$$-H_2$$-O_2$ gas mixture show relatively good adhesion, very uniform, dense and polycrystalline morphology.

키워드

참고문헌

  1. S. Chatterjee, A. G. Edwards and C. S. Feigerle, 'Machining and morphologica evaluation of diamond coated tungsten carbide drills', Journal of material science, Vol. 35, pp, 5707-5717, 2000 https://doi.org/10.1023/A:1004862609183
  2. H. Sein, W. Ahmed and C. Rego, 'Application of diamond coating onto small dental tools', Diamond and Related Materials, Vol. 11, pp. 731-735, 2002 https://doi.org/10.1016/S0925-9635(01)00579-9
  3. F.H. Sun, 2.M. Zhang, M. Chen and H.S. Shen, 'Fabrication and application of high quality diamondcoated tools', Journal of Materials Processing Technology, Vol. 129, pp. 435-440, 2002 https://doi.org/10.1016/S0924-0136(02)00635-0
  4. M. Zhibin, W. Iianhua, W. Qingchong and W. Chuanxin, 'Adhesion improvement of diamonds on cemented carbides with copper implant layer', Thin Solid Films, Vol. 390, pp. 104-106, 2001 https://doi.org/10.1016/S0040-6090(01)00946-4
  5. W. Tang, Q. Wang, S. Wang and F. Lu, 'Adherent diamond coating on cemented carbide substrates with different cobalt contents', Diamond and Related Materials, Vol. 10, pp, 1700-1704, 2001 https://doi.org/10.1016/S0925-9635(01)00398-3
  6. F. Deuerler, H. Gruner, M. PoW and L. Tikana, 'Wear mechanism of diamond-coated tools', Surface and Coating Technology, Vol. 142-144, pp, 674-680, 2001 https://doi.org/10.1016/S0257-8972(01)01156-2
  7. K. E. Spear and J. P. Dismukes, 'Synthetic Diamond: Emerging CVD Science and Technology', pp. 161-163, 1994
  8. 구효근, 박상현, 박재윤, 김경환, '고주파 플라즈마 CVD에 의한 저 압력에서의 다이아몬드 막의 성장', 전기학회논문지, 50C권, 2호, pp.49-56, 2001
  9. 박상현, '초경합금 기판에 성장된 다이아몬드 막의 특성', 논문집, 경남대 공업기술연구소, 제14권, 제2호, pp.167-174, 1997
  10. 구효근, 이임숙, 박상현, 'MWPECVD법에 의한 $H_2-CH_4-O_2$ 계로부터의 Diamond합성', 신소재연구소논문집, Vol.5, pp.65-76, 1995
  11. K. E. Spear and J. P. Dismukes, 'Synthetic Diamond: Emerging CVD Science and Technology', pp. 412-413, 1994
  12. Y. Fu, N.L. Loh, B. Yan, C.Q. Sun and P. Hing, 'Control of microstructure coarsening of a Ti substrate during diamond film deposition using $Ar/H_2/CH_4$, gas mixture', Thin Solid Films Vol.. 359, pp. 215-220, 2000 https://doi.org/10.1016/S0040-6090(99)00750-6
  13. M.S. Kang, W.S. Lee and Y.J. Baik, 'Morphology variation of diamond with increasing pressure up to 400 torr during deposition using hot filament CVD', Thin Solid Films Vol. 398-399, pp. 175-179, 2001 https://doi.org/10.1016/S0040-6090(01)01390-6
  14. Q. H. Fan, J. Gracio, E. Pereira, N. Ali and W. Ahmed, 'Study of diamond adhesion behavior on chromium and titanium for obtaining adherent diamond coatings on steel', J. Mater. Res., Vol. 15, No. 11, pp. 2330-2335, Nov, 2000 https://doi.org/10.1557/JMR.2000.0335