Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropump

열공압 방식의 polydimethylsiloxane 마이크로 펌프의 제작 및 특성

  • Published : 2004.06.01

Abstract

A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass. We presented the PDMS micropump that is easily integrated with the in-channel PDMS microvalves on the same substrate. The flowrate of the micropump increases linearly as the applied pulse voltage to the ITO heater increases. The fabricated ITO heater resistance is 6.54k$\Omega$. The peak of the flow rate is observed at the duty ratio of 10% for the applied pulse voltage of 55V at 6Hz and the maximum flow rate of 78nl/min is measured.

Keywords

References

  1. Anders Olsson, Peter Enoksson, Gran Stemme, and Erik Stemme, 'Micromachined Flat-Walled Valveless Diffuser pumps,' Journal of Microelectromechanical System, vol.6, pp. 161-166, 1997 https://doi.org/10.1109/84.585794
  2. R. Zengerle, J. Ulrich, S. Kluge, M. Richter and A. Richter, 'A Bidrectional Silicon Micropump,' Sensors and Actuators A : Physical, vol.50, pp. 81-86, 1995 https://doi.org/10.1016/0924-4247(96)80088-4
  3. Sebastian Bohm, Wouter Olthuis and Piet Bergveld, 'A Plastic Micropump Constructed with Conventional Techniques and Materials,' Sensors and Actuators A : Physical, vol.77, pp. 223-228, 1999 https://doi.org/10.1016/S0924-4247(99)00192-2
  4. Eiji Makino, Takashi Mitsuya and Takayuki Shibata, 'Fabrication of TiNi Shape Memory Micropump,' Sensors and Actuators A : Physical, vol.88, pp.256-262, 2001 https://doi.org/10.1016/S0924-4247(00)00522-7
  5. Ok Chan Jeong and Sang Sik Yang, 'Fabrication and Test of a Thermopneumatic Micropump with a Corrugated $P^+$ Diaphragm,' Sensors and Actuators A : Physical, vol.83, pp. 249-255, 2000 https://doi.org/10.1016/S0924-4247(99)00392-1
  6. Senol Mutlu, Cong Yu, P. Selvaganpathy, Frantisek Syec, Carlos H. Mastrangelo, and Jean M.J. Frecher, 'Micromachined Porous Polymer for Bubble Free Electro-osmotic Pump,' The Fifteenth IEEE International Conference on Micro Electro Mechanical System, MEMS 2002, pp.19-32, 2002 https://doi.org/10.1109/MEMSYS.2002.984050
  7. Jin-Ho Kim, Kwang-Ho Na, C. J. Kang, D. Jeon, and Yong-Sang Kim, 'Thermopneumatic-actuated PDMS Microvalve,' Microelectronic Engineering, vol.71, pp.119, 2004 https://doi.org/10.1016/j.mee.2003.10.005
  8. Kazuo Hosokawa and Ryutaro Maeda, 'Low-Cost Technology for High-Density Microvalve Arrays Using polydimethylsiloxane(PDMS),' The 14th IEEE International Conference on Micro Electro Mechanical System, MEMS 2001, pp.531-534, 2001 https://doi.org/10.1109/MEMSYS.2001.906596
  9. Ok Chan Jeong and Sang Sik Yang,'Fabrication of a Thermopneumatic Microactuator with a Corrugated $P^+$ Silicon Diaphagm,' Sensors and Actuators A : Physical, vol.80, pp.62-67, 2000 https://doi.org/10.1016/S0924-4247(99)00300-3
  10. Anders. Olsson, Gran. Stemme, and Erik. Stemme, ' A Valve-less Planar Fluid Pump with Tow Pump Chambers,' Sensors and Actuators A : Physical, vol.A46-47, pp.549-556, 1995 https://doi.org/10.1016/0924-4247(94)00960-P
  11. Bourouina, Tarik, Bosseboeuf, Alain, and Grandchamp, Jean-Paul, 'Design and simulation of an electrostatic micropump for drug-delivery applications,' Journal of micromechanics and microengineering, vol. 7 no. 3, pp.186-188, 1997 https://doi.org/10.1088/0960-1317/7/3/028