Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
권호 표지

Thick-film ammonia gas sensor with high sensitivity and excellent selectivity

  • Published : 2004.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

A highly sensitive ammonia gas sensor using thick-film technology has been fabricated and examined. The sensing material of the gas sensor is FeOx-$WO_{3}-SnO_{2}$ oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element has been proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$gas sensor which shows opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.

Keywords

References

  1. T. Maekawa, J. Tamaki, N. Miura, and N. Yamazoe, Gold-Loaded Tungsten Oxide Sensor for Detection of Ammonia in Air, Chem. Lett., 1992, pp. 639-642
  2. T. Maekawa, J. Tamaki, N. Miura, and N. Yamazoe, New Aspects of Spillover Effect in Catalysis, ed. by T. Inui et al, Elsevier Science Publishers, Amsterdam, 1993, pp. 421-424
  3. Y. Takao, K. Miyazaki, Y. Shimizu, and M. Egashira, Semiconductor Ammonia Gas Sensors with Double-Layered Structure, Tech. Digest, 8th Int. Conf. Solid-State Sens. Actuators (Transducer '93), Yokohama, Japan, June 7-10, 1993, pp. 360-363
  4. H. Nanto, T. Minami, and S. Takata, Zinc-oxide Thin Film ammonia Gas sensor with High Sensitivity and Excellent Selectivity, J. App. Phys., 60, 1986, pp. 482-484 https://doi.org/10.1063/1.337435
  5. J. L. Gland and V. N. Korchak, Ammonia Oxidation on a Stepped Platinum Single-Crystal Surface, J. Catalysis, 53, 1978, pp. 9-23 https://doi.org/10.1016/0021-9517(78)90003-9
  6. T. Pignet and L. D. Schmidt, Kinetics of$NH_3$ Oxidation on Pt, Rh and Pd, J. Catalysis, 40, 1975, pp. 212-225 https://doi.org/10.1016/0021-9517(75)90249-3
  7. C. H. Kwon, D. H. Yun, H.-K. Hong, S.-R. Kim, K. Lee, H. Y. Lim and K. H. Yoon, Multi-layered thick film gas sensor array for selective sensing by catalytic filtering technology, Sens. Actuators B, 65, 2000, pp. 327-330 https://doi.org/10.1016/S0925-4005(99)00426-8
  8. S.-R. Kim, H.-K. Hong, C. H. Kwon, D. H. Yun, K. Lee, and Y. K. Sung, Ozone sensing properties of $InO_3$-based metal oxide semiconductor thick films, Sens. Actuators B, 66, 2000, pp. 59-62 https://doi.org/10.1016/S0925-4005(99)00468-2