VLSI 인터커넥션에 대한 풀-웨이브 방법을 이용한 신호 왜곡 해석에 관한 연구

A Study on the Signal Distortion Analysis using Full-wave Method at VLSI Interconnection

  • 발행 : 2004.04.01

초록

본 논문에서는 3차원 인터커넥트(3D interconnect) 구조를 해석하기 위하여 ADI-유한차분시간영역(ADI-FDTD: Alternating Direction Implicit Finite Difference Time Domain)법으로 맥스웰 회전 방정식(Maxwell's curl equation)을 계산하는 수치 해석 모델을 개발하였고, 개발한 ADI-유한차분시간영역법을 이용하여 3.3 V CMOS 기술로 설계된 샘플러 회로의 일부의 영역에 대해 컴퓨터 모의 실험 결과하여 입력된 구형 전압 신호가 금속 배선을 거치면서 5∼10 ps의 신호 지연과 0.1∼0.2 V의 신호 왜곡이 발생되는 것을 확인하였다. 결론적으로 ADI-유한차분시간영역법을 이용한 풀-웨이브 해석을 통하여 고속의 VLSI 인터커넥트에서의 전자기 현상을 정확하게 분석할 수 있음을 제시하였다.

In this paper, we developed a numerical analysis model by using ADI-FDTD method to analyze three-dimensional interconnect structure. We discretized maxwell's curl equation by using ADI-FDTD. Using ADI-FDTD method, a sampler circuit designed from 3.3 V CMOS technology is simplified to 3-metal line structure. Using this simplified structure, the time delay and signal distortion of complex interconnects are investigated. As results of simulation, 5∼10 ps of delay time and 0.1∼0.2 V of signal distortion are measured. As demonstrated in this paper, the full-wave analysis using ADI-FDTD exhibits a promise for accurate modeling of electromagnetic phenomena in high-speed VLSI interconnect.

키워드

참고문헌

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