한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제21권2호
  • /
  • Pages.203-209
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  • 2004
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  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Chevron형 bi-stable MEMS 구동기의 모델링 및 실험적 응답특성 분석

Modeling and Experimental Response Characterization of the Chevron-type Bi-stable Micromachined Actuator

  • 황일한 (광주과학기술원 기전공학과) ;
  • 심유석 (광주과학기술원 기전공학과) ;
  • 이종현 (광주과학기술원 기전공학과)
  • 발행 : 2004.02.01
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초록

Compliant bi-stable mechanism allows two stable states within its operation range staying at one of the local minimum states of the potential energy. Energy storage characteristics of the bi-stable mechanism offer two distinct and repeatable stable states, which require no power input to maintain it at each stable state. This paper suggests an equivalent model of the chevron-type bi-stable microactuator using the equivalent spring stiffness in the rectilinear and the rotational directions. From this model the range of spring stiffness where the bi-stable mechanism can be operated is analyzed and compared with the results of the FEA (Finite Element Analysis) using ANSYS for the buckling analysis, both of which show a good agreement. Based on the analysis, a newly designed chevron-type bi-stable MEMS actuator using hinges is suggested for the latch-up operation. It is found that the experimental response characteristics of around 36V for the bi-stable actuation for the 60$mu extrm{m}$ stroke correspond very well to the results of the equivalent model analysis after the change in cross-sectional area by the fabrication process is taken into account. Together with the resonance frequency experiment where 1760Hz is measured, it is shown that the chevron-type bi-stable MEMS actuator using hinges is applicable to the optical switch as an actuator.

키워드

참고문헌

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