A Study on Mass Flow Control and FEA of Plate Spring Attached in Piezoelectric Ceramic

세라믹 압전체에 부착된 판 스프링의 유한요소해석과 질량 흐름 제어에 관한 연구

In this paper, the relation between displacement of piezoelectric material and electric field was proposed. FEA was introduced to predict the displacement and reaction force of plate spring attached in the piezoelectric material. The relation between displacement of piezoelectric material forced by plate spring and applied electric field were further verified by experimental investigation. Also, the flow rate of gas in piezoelectric valve was examined by experiment. Finally, the relation between electric field and gas flow was derived. Based on these results, these relations can be used in the design of mass flow controller.