반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제2권3호
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- Pages.37-43
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- 2003
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- 1738-2270(pISSN)
나노 측정시스템을 위한 방진 구조물의 동적 설계에 관한 연구
A Study on the Dynamic Design of Anti-Vibration Structures for Nano-class Measuring System
초록
It is necessary to design the anti-vibration system of precision machinery for a quality assurance. However, in general, the allowable vibration limit is not well known. In this paper, the vibration criteria for foundation of sensitive machinery is proposed and anti-vibration system is designed by using vibration measurement results of foundation. Also, the finite element analysis is performed to verify the effectiveness of the designed anti-vibration system and to determine the allowable dynamic loads of precision measuring system. The results of this study will be helpful for the future design of anti-vibration structures with nano scale measuring system.