The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electrical Properties of SBT Capacitors with Top Electrodes

다양한 상부전극에 따른 SBT 커패시터의 전기적 특성

  • Published : 2003.12.01
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Abstract

The A S $r_{0.7}$B $i_{2.6}$T $a_2$ $O_{9}$ (SBT)thin films are deposited on Pt-coated electrode(Pt/$TiO_2$/$SiO_2$/Si) using a RF magnetron sputtering method. The electrical properties of SBT capacitors with top electrodes were studied. In the XRD pattern, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized at 75$0^{\circ}C$ and grains largely grew in oxygen annealing atmosphere. The electrical properties of SBT capacitor with top electrodes represent a favorable properties in Pt electrode. The maximum remanent polarization and the coercive electric field with Pt electrode are 12.40C/$\textrm{cm}^2$ and 30kV/cm, respectively. The dielectric constant and leakage current density with Pt electrode is 340 and 6.8110$^{-10}$ A/$\textrm{cm}^2$, respectively.y.y.

Keywords

References

  1. Dong-soo Paik et al, 'Fabrication and Characteristics of PZT Ferroelectric Thin Films by Sol-Gel Processing and Rapid Thermal Annealing', Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol. 13, No. 4, pp.369, 1994
  2. Ichiro Koiwa et al, 'Effects of H2 shintering and Pt Upper Electrode on Metallic Bi Content in SrBi2Ta209 Thin films for Ferroelectric Memories Prepared by Sol - Gel Method ', Jpn. J. Appl. Phys. Vol.37 Pt.1 ,No.9B, pp.5192, 1998 https://doi.org/10.1143/JJAP.37.5192
  3. D.S.Shin et al, 'Effects of Morphological Changes of Pt/SrBi2Ta209 Interface on the Electrical Properties of Ferroelectric Capacitor', Jpn. J. Appl, Phys, Vol. 37. pp.5189, 1998 https://doi.org/10.1143/JJAP.37.5189
  4. S. Y. Chen et al, 'Aging Behavior and Recovery of Polarization in Sr0.8Bi2.4Ta209 Thin Films', J. Appl, Phys, Vol. 87, No .6, pp3050, 2000 https://doi.org/10.1063/1.372298
  5. Kazumi Kato, 'Low-Temperature Synthesis of SrBi2Ta209 Ferroelectric Thin Films through the Complex Alkoxide Method:Effects of Functional Group, Hydrolysis and Water Vapor Treatment', Jpn. J. Appl. Phys. Vol. 37, Pt.1, No.9B, pp.5178, 1998 https://doi.org/10.1143/JJAP.37.5178
  6. Kazunari Maki, Nobuyuki Soyama, Satoru Mori and Katsumi Ogi 'Evaluationof Pb(Zr,Ti)O3 Films Derived from Propylene-Glycol-Based Sol-Gel Solutions' Jpn.J.Appl.Phys, Vol.39, Pt.1, No.9B, pp 5421-5425, 2000 https://doi.org/10.1143/JJAP.39.5421
  7. Nobuyuki Soyama, Kazunari Maki, Satoru Mori and Katsumi Ogi, 'Preparation and Evaluation of Pb(Zr,Ti)03 Thin Films for Low Voltage Operation' Jpn.J.Appl.Phys. Vol.39, Pt.1, No.9B, pp 5434-5436, 2000 https://doi.org/10.1143/JJAP.39.5434
  8. C. I. Cheon et al, 'Electrical Properties of SBT Ferroelectric Thin Films Prepared by MOD', Journal of the Korean Institute of Electrical and Electronic Material Engineers. Vol. 12, No.2, pp.151, 1999
  9. M. A. Rodrinues et al, 'Phase formation and characterization of the SrBi2Ta2O9 layered-perovskite ferroeelctric' Intergrated Ferroelectric, Vol. 14, pp. 201, 1997 https://doi.org/10.1080/10584589708019993
  10. S. C. Sun and T.F. Chen, 'Effect of Electrode Materials and Annealing Ambients on the Electrical Properties of TiO2 Thin Films by Metalorganic Chemical Vapor Deposition', Jpn. J. Appl Phys, Vol. 36, pp.1346-1350, 1997 https://doi.org/10.1143/JJAP.36.1346