Biotechnology and Bioprocess Engineering:BBE

  • 제8권4호
  • /
  • Pages.252-256
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  • 2003
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  • 1226-8372(pISSN)
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  • 1976-3816(eISSN)
한국생물공학회 (The Korean Society for Biotechnology and Bioengineering)
권호 표지

Neural Interface with a Silicon Neural Probe in the Advancement of Microtechnology

  • Oh, Seung-Jae (School of Electrical and Computer Engineering, Nano Bioelectronics and Systems Research Center, Seoul National University) ;
  • Song, Jong-Keun (School of Electrical and Computer Engineering, Nano Bioelectronics and Systems Research Center, Seoul National University) ;
  • Kim, Sung-June (School of Electrical and Computer Engineering, Nano Bioelectronics and Systems Research Center, Seoul National University)
  • 발행 : 2003.07.01
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초록

In this paper we describe the status of a silicon-based microelectrode for neural recording and an advanced neural interface. We have developed a silicon neural probe, using a combination of plasma and wet etching techniques. This process enables the probe thickness to be controlled precisely. To enhance the CMOS compatibility in the fabrication process, we investigated the feasibility of the site material of the doped polycrystalline silicon with small grains of around 50 nm in size. This silicon electrode demonstrated a favorable performance with respect to impedance spectra, surface topography and acute neural recording. These results showed that the silicon neural probe can be used as an advanced microelectrode for neurological applications.

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