Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Annealing Effect of the Chalcogenide Thin Film for Holographic Grating Formation

홀로그래픽 격자 형성에 대한 칼코게나이드 박막의 열처리 효과

  • 박정일 (광운대학교 전자재료공학과) ;
  • 신경 (광운대학교 전자재료공학과) ;
  • 이정태 (광운대학교 전자재료공학과) ;
  • 이영종 (여주대학 전자과) ;
  • 정홍배 (광운대학교 전자재료공학과)
  • Published : 2003.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

We prepared the chalcogenide As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35/, Se$\_$75/Ge$\_$25/ thin film. Holographic grating was formed by the He-Ne laser( λ =633 nm). Annealing at 100$^{\circ}C$ and 200$^{\circ}C$ has been used to change the optical property of chalcogenide thin films for holographic grating formation. As the results, large variation of the optical property was generated at the As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35/ chalcogenide film. Diffraction efficiency of the As$\_$40/Ge$\_$10/Se$\_$15/S$\_$35/ film has been enhanced about three times

Keywords

References

  1. J. of Non-Crystalline Solids v.266-269 Photodarkening in glassy $As_{2}S_{3}$ Iari;T.S.Taylor;P.L.Kuhns;W.G.Moulton;N.S.Sullivan https://doi.org/10.1016/S0022-3093(99)00868-6
  2. J. of Non-Crystalline Solids v.299-302 Thickness effect of the photodarkening in amorphous chalcogenide films K.Hyashi;N.Mtsuishi https://doi.org/10.1016/S0022-3093(01)01059-6
  3. J. of Non-Crystalline Solids v.266-269 Sub-gap excitation effects in $As_{2}S_{3}$ glass K.Tanaka https://doi.org/10.1016/S0022-3093(99)00861-3
  4. Applied Physics Letters v.74 no.15 In situ photoexpansion measurement of amprphous $As_{2}S_{3}$ films:Role of photocarriers A.Ganjoo;Y.Ikeda;K.Shimakawa https://doi.org/10.1063/1.123775
  5. Synthetic Metals v.9157 Surface and volume contributions to total diffractional efficiency in $As_{2}S_{3}$ thin films galsses M.Fischer;T.Galstian;R.Valle'e;A.Salimina
  6. J. of Non-Crystalline Solids v.198-200 Vectoral and scalar photoinduced effects in chalcogenide galsses S.R.Elliott;V.K.Tikhomirov https://doi.org/10.1016/0022-3093(96)00002-6
  7. 한국전기전자재료학회 2000하계학술대회논문집 v.1 no.1 비정질 칼코게나이드 As-Se-Ge-S 박막에서 편광기록 및 재생 장선주;손철호;여철호;박정일;이영종;정흥배
  8. J. of Non-Crystalline Solids v.198-200 Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists N.P.Eisenberg;M.Manevich;M.Klebanov;V.Lyubin;S.Shtutina https://doi.org/10.1016/0022-3093(96)00118-4
  9. Microelectronic Engineering v.57-58 120-nm lithography using off-axis TIR holography and 364-nm exposure wavelength M.Barge;S.Bruynooghe https://doi.org/10.1016/S0167-9317(01)00430-0
  10. J. of Non-Crystalline Solids v.284 Optical fibers based on As-S-Se glass system M.F.shurbanov;V.S.Shiryaev https://doi.org/10.1016/S0022-3093(01)00394-5
  11. J. of Non-Crystalline Solids v.299-302 Amorphous As-S-Se semiconductor resists for holography and lithography J.Teteris https://doi.org/10.1016/S0022-3093(01)01126-7
  12. 한국전기전자재료학회 2000하계학술대회논문집 v.1 no.2 비정질 칼코게나이드 박막에 surface relief 격자 형성 박종화;장선주;박정일;여철화;이영종;정흥배
  13. 전기전자재료학회논문지 v.13 no.9 비정질 칼코게나이드 As-Ge-Se-S 박막에서 편광기록 및 재생 장선주;박종화;손철호;정흥배
  14. Longman Scientific & Technical (second edition) Physics of Amorphous Marerials S.R.Elliott