KIEE International Transactions on Electrophysics and Applications

대한전기학회 (The Korean Institute of Electrical Engineers)
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Conformal $Al_2$O$_3$ Nanocoating of Semiconductor Nanowires by Atomic Layer Deposition

  • 발행 : 2003.04.01
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초록

Various semiconductor nanowires such as GaN, GaP, InP, Si$_3$N$_4$, SiO$_2$/Si, and SiC were coated conformally with aluminum oxide (Al$_2$O$_3$) layers by atomic layer deposition (ALD) using trimethylaluminum (TMA) and distilled water ($H_2O$) at a temperature of 20$0^{\circ}C$. Transmission electron microscopy (TEM) revealed that A1203 cylindrical shells conformally coat the semiconductor nanowires. This study suggests that the ALD of $Al_2$O$_3$ on nanowires is a promising method for preparing cylindrical dielectric shells for coaxially gated nanowire field-effect transistors.

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참고문헌

  1. J. W. Klaus, A. W. Ott, A. C. Dillon, and S. M. George, Surf. Sci. 418, L14 (1998)
  2. A. Paranjpe, S. Gopinath, T. Omstead, and R. Bubber, J. Electrochem. Soc. 148, G465 (2001)
  3. H. W. Seo, S. Y. Bae, J. Park, H. Yang, and S. Kim, Chem. Commun. 2564 (2002)
  4. Y. Kim, S. M. Lee, C. S. Park, S. I. Lee, and M. Y. Lee, Appl. Phys. Lett. 71, 3604 (1997)
  5. Y. widjaja and C. B. Musgrave, Appl. Phys. Lett. 80, 3304 (2002)
  6. A. W. Ott, K. C. McCarley, J. W. Klaus, J. D. Way, and S. M. George, Appl. Surf. Sci. 107, 128 (1996)
  7. B. Lux, C. Colombier, H. Altena, and K. Stjernberg, Thin Solid Films 138,49 (1986)
  8. M. D. Groner, J. W. Elam, F. H. Fabreguette, and S. M. George, Thin Solid Films 414,43 (2002)
  9. M. Juppo, A. Rahtu, M. Ritala, and Leskela, Langmuir 16, 4034 (2000)
  10. W. S. Yang, Y. K. Kim, S. Y. Yang, J. H. Choi, H. S. Park, S. I. Lee, and J. B. Yoo. Surface and Coatings Technology 131,79 (2000)
  11. L. J. Lauhon, M. S. Gudiksen, D. Wang, and C. M. Lieber, Nature 420, 57 (2002)
  12. H. W. Seo, S. Y. Bae, J. Park, H. Yang, K. S. Park, and S. Kim, J. Chem. Phys. 116, 9492 (2002)
  13. H. Y. Kim, J. Park, and H. Yang, Chem. Commun. 256 (2003)
  14. K. Park, J. S. Lee, M. Y. Sung, and S. Kim, jpn. J. Appl. Phys. 41,7317 (2002)
  15. H. Iizuka, K. Yokoo, and S. Ono, Appl. Phys. Lett. 61, 2978 (1992)
  16. A. Yamada, B. Sang, and M. Konagai, Appl. Surf. Sci. 112, 216 (1997)
  17. H. Gumagai, M. Matsumoto, K. Toyoda, M. Obara, and M. Suzuki, Thin Solid Films 263, 47 (1995)
  18. J. W. Elam, Z. A. Sechrist, and S. M. George, Thin-Solid Films 414, 43 (2002)