Effects of Two-Step Annealing Process on the Pulsed Laser Ablated Lead Zirconate Titanate Thin Films

  • 발행 : 2003.04.01

초록

Lead zirconate titanate (PZT) thin films were fabricated by the pulsed laser ablation deposition (PLAD) method onto Pt/Ti/SiO$_2$/Si substrates. Crystalline phases as well as preferred orientations in PZT films were investigated by X-ray diffraction analysis (XRD). The well-crystallized perovskite phase and the (101) preferred orientation were obtained by two-step annealing at the conditions of $650^{\circ}C$, 1 hour. It was found that the temperature for the pulsed laser ablated PZT films annealed via a two-step annealing process can be reduced 20$0^{\circ}C$ compared to that of the conventional three-step annealing temperature profile for enhancing the transformation of the perovskite phase. The remanent polarization and the coercive field of this film were about 20 $\mu$C/$\textrm{cm}^2$ and 46 kV/cm, while the dielectric constant and loss values measured at 1 KHz were approximately 860 and 0.04, respectively. The interesting phenomena of this film, such as vertical shift in hysteresis curve, are also discussed.

키워드

참고문헌

  1. B. Jaffe, W. R. Cook, and H. Jaffe, Piezoelectric Ceramics(Academic, London, 1971)
  2. C. Sudhama, J. Kim, R. Khamankar, V. Chikarmane, and J. C. Lee, 'Thickness-Scaling of Sputtered PZT Films in the 200 nm Range for Memory Applications' J. Electon. Mater. 23, 1261 (1994)
  3. J. Lappalainen, J. Frantti, H. Moilanen, and S. Leppavuori, 'Eximer Laser Ablation of PZT Thin Films on Silicon Cantilever Beams', Sens. Actuators A 46,47, 104 (1995)
  4. N. Braithwaite and G. Weaver, Electronic Materials (Butterworth Scientific Ltd., London, 1990), p.168
  5. C. H. Peng and S. B. Desu, 'Metalorganic Chemical Vapor Deposition of Ferroelectric Pb(Zr, Ti)$O_{3}$ Thin Films', J. Am. Ceram. Soc. 77,1799 (1994)
  6. S. B. Krupanidhi, N.Maffei, M. Sayer, and K. El-Assl, 'RF Planar Magnetron Sputtering and Characterization of Ferroelectric Pb(Zr, Ti)$O_{3}$ Films,' J. Appl. Phys. 54, 6601 (1983)
  7. L.Meidong, L. Chunru, W. Peiying, R. Yunhua, Z. Yike, and L. Churong, 'Preparation of PZT Ferroelectric Thin Films by Sol-Gel Processing and Their Properties', Sens. Actuators A 49, 191 (1995)
  8. R. Maeda and K. Kikuchi, 'Deposition of Thin Films by UV Light Laser Ablation,' Surface Engineer. 13, 1,71 (1997)
  9. G. A. C. M. Spierings, G. J. M. Dormans, W. G. J. Moors, M. J. E. Ulenaers, and P. K. Larsen, 'Stresses in PT/Pb(Zr, Ti)$O_{3}$/Pt thin-film stacks for integrated ferroelectric capacitors' J. Appl. Phys. 78, 1926 (1995)
  10. W. M. Lin, K. Kikuchi, A. Schroth, S. Matsumoto, and R. Maeda, 'Development of Micromachined Scanning Beams and Mirrors Actuated by Eximer Laser Ablation Deposited PZT Thin Films,' Proc. 3rd Intern. Conf. Micro Opto Mechanical Systems, Mainz,1999
  11. Z. Wang, M. Ryutaro, and K. Kikuchi, 'Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro-Actuators', T. IEE Japan. 119-E: 4, 254-259 (1999)
  12. A. Umezawa, R. Maeda, A. Schroth, and K. Kikuchi, 'Deposition of PZT thin Films by Eximer Laser Ablation Deposition', J. Mech. Engineer. Laboratory. 52: 2,53 (1998) (in Japanese)
  13. K. Kikuchi, Z. J. Wang, A. Umezawa, and R. Maeda, 'Deposition of PZT Thin Films by Eximer Laser Ablation for Piezoelectric Application,' Ferroelectrics. 224: 267 (1999)
  14. S. Okamura, S. Miyata, Y. Mizutani, T. Nishida, and T. Shiosaki, 'Conspicuous Voltage Shift of D-E Hysteresis Loop and Asymmetric Depolarization in Pb-Based Ferroelectric Thin Films,' Jpn. J. Appl. Phys. 38: 5364-5367 (1999)