한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제20권6호
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  • Pages.27-36
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  • 2003
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

전기점성유체를 이용한 단결정 실리콘의 초정밀 연마에 관한 연구

A Study on the Ultraprecision Polishing of Single Crystal Silicon using Electrorheolgical Fluids.

  • 발행 : 2003.06.01
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초록

The Electro-Rheological (ER) fluid has been used to the ultraprecision polishing of single crystal silicon as new polishing slurry whose properties such as yield stress and particle structure changed with the application of an electric field. In this work, it is aimed to find the effective parameters in the ER fluid on material removal in the polishing system whose structure is similar to that of the simple hydrodynamic bearing. The generated pressure in the gap between a moving wall and a workpiece, as well as the electric field-induced stress of the mixture of ER fluid-abrasives, is evaluated experimentally, and their influence on the polishing of single crystal silicon is analyzed. Moreover, the behavior of abrasive and ER particles is described.

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참고문헌

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