한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제40권4호
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  • Pages.393-397
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  • 2003
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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Role of Am Piezoelectric Crystal Orientation in Solidly Mounted Film Bulk Acoustic Wave Resonators

  • 발행 : 2003.04.01
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초록

To investigate the effect of AIN c-axis orientation on the resonance performance of film bulk acoustic wave resonators, solidly mounted resonators with crybtallographically different AIN piezoelectric films were prepared by changing only the bottom electrode surface conditions. As increasing the degree of c-axis texturing, the effective electromechanical coupling coefficient ($\kappa$$\_$eff/)$^2$ in resonators increased gradually. The least 4 degree of full width at half maximum in an AIN(002) rocking curve, which corresponds to $\kappa$$^2$$\_$eff/ of above 5%, was measured to be necessary for band pass filter applications in wireless communication system. The longitudinal acoustic wave velocity of AIN films varied with the degree of c-axis texturing. The velocity of highly c-axis textured AIN film was extracted to be about 10200 n/s by mathematical analysis using Matlab.

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참고문헌

  1. IEEE Trans. Microwave Theory Tech. v.43 no.12 Development of Miniature Filters for Wireless Application K.M.Lakin;G.R.Kline;K.T.McCarron https://doi.org/10.1109/22.475658
  2. IEEE Proceedings on Ultrasonics Symposium Thin-film Resonators and Filters K.M.Lakin
  3. IEEE Proceeding on Ultrasonics Symposium BAW Resonators Based on Aluminum Nitride Thin Films M.A.Dubois;P.Muralt;V.Plessky
  4. IEEE MTT-S Int. Microwave Symp. Dig. Bulk Acoustic Wave Resonators and Filters for Applications Above 2 GHz K.M.Lakin;J.R.Belsick;J.P.McDonald;K.T.McCarron;C.W.Andrus
  5. IEEE Proceedings on Ultrasonics Symposium ZnO Based Thin Film Bulk Acoustic Wave Filters for EGSM Band J.Kaitila;M.Ylilammi;J.Molarius;J.Ella.T.Makkonen
  6. IEEE Proceedings on International Frequency Contro Symposium and PDA Exhibition PZT Thin Film Bulk Acoustic Resonators and Filters P.B.Kirby;Q.X.Su;E.Komur;Q.Zhang;M.Imura;R.Whatmore
  7. Sensors and Actuators v.77 Measurement of the Effective Transverse Piezoelectric Coeffecient e of AIN and Pb(Zr Ti )O Thin Films M.A.Dubois;P.Muralt https://doi.org/10.1016/S0924-4247(99)00070-9
  8. IEEE Trans. Ultrason. Ferroelectr. Freq. Control v.47 no.1 Measurements of the Bulk. C-axis Electromechanical Coupling Constant as a Function of AIN Film Quality R.S.Naik;J.J.Lutsky;R.Reif;C.G.Sodini;A.Becker;L.Fetter;H.Huggins;R.Miller;J.Pastalan;G.Rittenhouse;Y.H.Wong https://doi.org/10.1109/58.818773
  9. J. Voc. Sci. Technol v.A.21 no.1 Growth of Highly caxis Textured AIN Films on Mo Electrodes for Film Bulk Acoustic Wave Resonators S.H.Lee;J.K.Lee;K.H.Yoon
  10. J. Kor. Ceram. Soc v.37 no.12 AIN-Si Thin Film Bulk Acoustic Over-moded Resonator S.H.Lee;J.K.Lee;S.H.Kim;J.H.Kim;K.H.Yoon
  11. IEEE Trans. Microwave Theory and Tech. v.41 no.12 High-Q Microwave Acoustic Resonators and Filters K.M.Lakin;G.R.Kline;K.T.McCarron https://doi.org/10.1109/22.260698
  12. Acoustic Waves: Devices, Imaging, and Analog signal processing G.S.Kino
  13. J. Phys.D v.31 Growth and Applications of Group III-nitrides O.Kmbacher https://doi.org/10.1088/0022-3727/31/20/001
  14. IEEE Proceedings on Ultrasonics Symposium Filter Banks Implemented with Integrated Thin Film Resonators K.M.Lakin;K.T.McCarron;J.Belsick;R.Rose
  15. IEEE Proceedings on Ultrasonics Symposium High Performance and Miniature Thin FIlm Bulk Acosutic Wave Filters for 5 GHz T.Nishinara;T.Yokoyama;T.Miyashita;y.Satoh
  16. J. Appl. Phys. v.92 no.7 Influence of Electrode Configurations on the Quality Factor and Piezoelectric Coupling Constant of Solidly Mounted Bulk Acoustic Wave Resonators S.H.Lee;K.H.Yoon;J.K.Lee https://doi.org/10.1063/1.1505977

피인용 문헌

  1. Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems vol.2, pp.4, 2013, https://doi.org/10.1149/2.001305jss
  2. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications vol.40, pp.20, 2007, https://doi.org/10.1088/0022-3727/40/20/S19