Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Sol-gel Mechanism of Self-patternable PZT Film Starting from Alkoxides Precursors

  • Hwang, Jae-Seob (Department of Ceramic Engineering, Yonsei University) ;
  • Kim, Woo-Sik (Department of Ceramic Engineering, Yonsei University) ;
  • Park, Hyung-Ho (Department of Ceramic Engineering, Yonsei University) ;
  • Kim, Tae-Song (Microsystem Center, Korea Institute of Science and Technology)
  • Published : 2003.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

Keywords

References

  1. Sol-gal Science, The Physics and Chemistry of Sol-gel Processing C.J.Brinker;G.W.Scherer
  2. Micro. Eng. v.29 Microelectromechanical System Based on Ferroelectric Thin Films D.L.Polla https://doi.org/10.1016/0167-9317(95)00114-X
  3. Science and Technology of Intergrated Ferroelectrics 2000 Sol-gel Derived Ferroelectric Thin Films in Silicon Micromachining C.C.Hsueh;T.Tamagawa;C.Ye;A.Helgeson;D.L.Polla;C.Paz de Araujo(ed.);O.Auciello(ed.);R.Ramesh(ed.);G.W.Taylor(ed.)
  4. Appl. Phys. Lett. v.73 no.11 Self-patterning Nano-electodes on Ferroelectric Thin Films for Gigabit Memory Applications M.Alexe;J.F.Scott;C.Curran;N.D.Zakharov;D.Hesse;A.Pignolet https://doi.org/10.1063/1.122214
  5. Appl. Phys. Lett. v.75 no.8 Switching Properties of Self-assembled Ferroelectric Memory Cells M.Alexe;A.Gruverman;C.Hamagea;N.D.Zakharov;A.Pienolet;D.Hesse;J.F.Scott https://doi.org/10.1063/1.124628
  6. Integrated Ferroelectrics v.16 Characterization of Self-patterned SrBi₂Ta O₂Thin Films from Photo-sensitive Solutions H.Uchida;N.Soyama;K.Kageyama;K.Ogi;M.C.Scott;J.D.Cuchiaro;G.F.Derbenwick;L.D.Mcmillan;C.A.Paz de Araujo https://doi.org/10.1080/10584589708013028
  7. Jpn. J. Appl. Phys. v.38 Evaluation of Self-patterned PbZr Ti O Thin Film from Photosensitive Solution G.Uozumi;K.Kageyama;T.Atsuki;N.Soyama;H.Uchida;K.Ogi https://doi.org/10.1143/JJAP.38.5350
  8. Introduction to Sol-gel Processing A.C.Pierre
  9. Progress in Solid State Chemistry v.18 Sol-gel Chemistry of Transition Metal Oxides J.Livage;M.Henry;C.Sanchez https://doi.org/10.1016/0079-6786(88)90005-2
  10. J. of Non-Cryst. Solids v.100 Chemical Modification of Alkoxide Precursors C.Sanchez;J.Livage;M.Henry;F.Babonneau https://doi.org/10.1016/0022-3093(88)90007-5
  11. J. of Chem. Phys. v.68 no.8 Electronegativity: The Density Functional Viewpoing R.G.Parr;R.A.Donnelly;M.Levy;W.E.Palke
  12. Organic Chemistry(5th Edition) J.McMurry
  13. J. of Sol-gel Sci. and Tech. v.20 Hydrolysis of Titanium Alkoxides: Thermochemical, Electon Microscopy. Saxs Studies N.V.Golubko;M.I.Yanovxkaya;I.P.Romm https://doi.org/10.1023/A:1008769918083
  14. J. of Sol-gel Sci. and Tech. v.12 Effect of Chemical Modificationon Hydrolysis and Condensation Reaction of Zirconium Alxoxide H.Hayashi;H.Suzuki;S.Kaneko https://doi.org/10.1023/A:1008661227954
  15. J. of Sol-gel Sci. and Tech. v.19 The Influence of β-Diketones on the Hydrolysis and Growth of Paricles from Zirconium(IV) n-propoxide M.J.Percy;J.R.Bartlett;L.Spiccian;B.O.West;J.L.Woolfrey https://doi.org/10.1023/A:1008781515324
  16. J. of Sol-gel Sci. and Tech. v.22 Control of Hydrolysis and Condensation Reactions of Titanium Tert-butoxide by Chemical Modification with Cathechol H.Honda;K.Suzaki;Y.Sugahara https://doi.org/10.1023/A:1011280723772
  17. J. of Sol-gel Sci. and Tech. v.8 FTIR Spectroscopy, SAXS and Electrical Conductivity Studies of the Hydrolysis and Condensation of Zirconium and Titanium Alkoxides M.T.Harris;A.Singhal;J.L.Look;J.R.Smith-Kris-tensen;J.S.Lin;L.M.Toth
  18. Plezoelectric Ceramics B.Jaffe;W.R.Cook;H.Jaffe
  19. Principles and applications of photochemistry R.P.Wayne

Cited by

  1. Nanocomposite Thin Films by a One-step Synthesis vol.44, pp.6, 2015, https://doi.org/10.1246/cl.150092