Siliconizing of Bonded Couple between Fe-5.8at.%Si and(Si Wafer or Fe-Si Alloy)

Fe-5.8 at.%Si과 (Si 웨이퍼 또는 Fe-Si합금)과의 접합에 의한 규소침투처리

  • 이성열 (한국해양대학교 기계소재공학부) ;
  • 정건영 (한국해양대학교 공과대학 기계소재공학부)
  • Published : 2003.01.01

Abstract

Reactive diffusion couples between Fe-5.8at.%Si and (Si wafer, $FeSi_2$, or FeSi alloy) were heat-treated at 1423k. The only layer of $Fe_3Si$ phase was formed in each diffusion couple. The width of $Fe_3Si$ layer was proportional to square root of diffusion time in each kind of diffusion couple. Growth rate of $Fe_3Si$ layer was relied on the concentration of Si in the supplied source of Si atoms. Interdiffusion coefficient of $Fe_3Si$ has been determined from the derived relation between growth rate constant and interdiffusion coefficient in this work. It was shown that the behavior of Kirkendall's void in $Fe_3Si$ layer was not affected by the kind of Si source. But solid solution $\alpha$ was formed in the diffusion couple between Fe-5.8 at.%Si and $Fe_3Si$ alloy. Kirkendall's voids in diffusional $\alpha$ were neglectively smaller than the case of $Fe_3Si$ phase growth.

Keywords

References

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