E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제16권1호
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- Pages.62.1-62
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Piezoelectric thin AIN films for bulk acoustic wave (BAW) resonators
- Loebl, H.P. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
- Klee, M. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
- Metzmacher, C. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
- Brand, W. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
- Milsom, R. (Philips Research Laboratories, Cross Oak Lane, Redhill, Surrey RHI 5HA, UK) ;
- Lok, P. (Philips Semiconductors, MSI, Gerstweg2, NL-6534 AE Nijmegen, The Netherlands)
- 발행 : 2003.01.01