Improvement in the crystallinity of ZnO thin films by introduction of a buffer layer

  • Nakamura, Toshiyuki (The Graduate School of Engineering, Gifu University) ;
  • Yamada, Yasusei (National Institute of Advanced Industrial Science and Technology (AIST)) ;
  • Kusumori, Takeshi (National Institute of Advanced Industrial Science and Technology (AIST)) ;
  • Minoura, Hideki (The Graduate School of Engineering, Gifu University) ;
  • Muto, Hachizo (The Graduate School of Engineering, Gifu University, National Institute of Advanced Industrial Science and Technology (AIST))
  • 발행 : 2003.01.01