Optimal Design and Development of Electromagnetic Linear Actuator for Mass Flow Controller

  • Chung, Myung-Jin (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Gweon, Dae-Gab (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 2003.01.01

초록

In this paper, we constructed the analytic model of control valve as a function of electric and geometric parameters, and analyzed the influence of the design parameters on the dynamic characteristics. For improving the dynamic characteristics, optimal design is conducted by applying sequential quadratic programming method to the analytic model. This optimal design aims to minimize the response time and maximize force efficiency. By this procedure, control valve can be designed to have fast response in motion.

키워드

참고문헌

  1. Grace, A., 1990, Optimization Toolbox User's Guide., The Math Works Inc
  2. Hanselman, D. C., 1994, Brushless Permanent Magnet Motor Design., McGraw-Hill Inc
  3. Hinkle, L. D. and Mariano, C. F., 1991, 'Toward Understanding the Fundamental Mechanisms and Properties of the Thermal Mass Flow Controller,' J. of Vacuum Science Technology, A9 (3) https://doi.org/10.1116/1.577452
  4. Holman, J. P., 1981, Heat Transfer., MaGraw-Hill Inc
  5. Krause, P. C., 1986, Analysis of Electric Machinery., MaGraw-Hill Book Company